公开(公告)号：US20130142955A1

公开(公告)日：2013-06-06

申请号：US13737719

申请日：2013-01-09

Applicant: INTERMOLECULAR, INC.

Inventor： Stephen Mark Lambert ,  Dennis Mullins ,  Cuong Manh Ta ,  Peter Wing Leung

IPC: B05C9/12 ,  B23P6/00 ,  B05D3/12

CPC classification number: B05C9/12 ,  B05C11/028 ,  B05D3/12 ,  B23P6/00 ,  Y10T29/49718

Abstract: A doctor blade assembly for use in combination with apparatus for forming a film on a substrate. The doctor blade assembly includes a doctor blade to be mounted on a programmable robot. The doctor blade has a bottom face and spacers at opposite ends of the body of the doctor blade extending a predetermined distance down below the bottom face of the body for contacting a substrate and spacing the bottom face from the substrate. The spacers are adjustable relative to the doctor blade for adjusting the predetermined distance according to the thickness of film to be formed on the substrate. Other aspects and methods are also disclosed.

Abstract translation: 一种刮刀组件，用于与在基底上形成膜的装置组合使用。 刮刀组件包括要安装在可编程机器人上的刮刀。 刮刀具有底面，并且在刮刀主体的相对端处的间隔件在主体的底面下方延伸预定距离，用于接触基底并将底面与基底间隔开。 间隔件相对于刮刀可调节，用于根据要在基底上形成的膜的厚度调节预定距离。 还公开了其它方面和方法。