公开(公告)号：US20140184242A1

公开(公告)日：2014-07-03

申请号：US13732474

申请日：2013-01-02

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Erik L. Hedberg ,  Daeik D. Kim ,  Dallas M. Lea ,  Akil K. Sutton ,  Steven J. Zier

IPC: G01R31/26

CPC classification number: G01R31/2884 ,  G01R31/2625

Abstract: A method and apparatus measure transistor bandwidth of a device under test in-line and on-wafer. The method includes disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer, and obtaining an amplitude gain based on the measurement circuit for the corresponding frequency.

Abstract translation: 一种测量在线和晶圆上的器件的晶体管带宽的方法和装置。 该方法包括将测量电路设置在晶片内的芯片上，测量电路包括产生振荡频率的环形振荡器，用于在晶片上转变通过被测器件，并且基于相应频率的测量电路获得幅度增益 。