公开(公告)号：US11669111B2

公开(公告)日：2023-06-06

申请号：US17010496

申请日：2020-09-02

申请人： Illinois Tool Works Inc.

发明人： Mohamed Saleem ,  Arun Nagarajan ,  Daniel Mudd ,  Hossein Ghapanchizadeh

IPC分类号： G05D7/01 ,  G01F1/36 ,  G01F15/00 ,  F16K1/32 ,  F16K1/36 ,  F16K1/42 ,  F16K27/02 ,  F16K31/06 ,  F16K37/00 ,  F16K17/04 ,  H01L21/67 ,  G05D7/06 ,  F16K1/00

CPC分类号： G05D7/0113 ,  F16K1/32 ,  F16K1/36 ,  F16K1/42 ,  F16K17/04 ,  F16K27/02 ,  F16K27/029 ,  F16K31/0655 ,  F16K31/0675 ,  F16K37/0091 ,  G01F1/36 ,  G01F15/005 ,  H01L21/67017 ,  H01L21/67242 ,  F16K1/00 ,  F16K37/005 ,  G05D7/0635

摘要： A valve assembly for controlling fluid flow rate comprising a valve block, a valve, a sensor chip package, and a controller interface. The valve block having an upstream reservoir, a downstream reservoir, and a valve seat for communicating fluid from an upstream location to a downstream location. The valve having a moveable member. The sensor chip package having at least one sensor coupled with the valve. The controller interface is communicable coupled to a control unit, the valve, and the sensor chip package. The controller interface sends at least one parametric value provided by the sensor chip package to the control unit. The controller interface receives a control signal used to adjust valve stroke of the valve. The control signal of the valve is determined based on the at least one measured parametric value and at least one other parametric value provided by a fluid processing system.