公开(公告)号：US20250149596A1

公开(公告)日：2025-05-08

申请号：US18537808

申请日：2023-12-13

Applicant: Industrial Technology Research Institute ,  National Tsing Hua University

Inventor： Hung-Hsin Shih ,  Kun-Ping Huang ,  Chi-Chang Hu ,  Hao-Yu Ku

IPC: H01M4/66 ,  C23C16/26 ,  H01M10/052 ,  H01M10/0568 ,  H01M10/0569

Abstract: A method of manufacturing a current collector of an energy storage device includes the following. A substrate is provided. A modified layer is formed on the substrate using a microwave plasma chemical vapor deposition process. The modified layer includes nanographene and has a thickness of 1 nm to 500 nm. In the microwave plasma chemical vapor deposition process, a microwave frequency is 300 MHz to 300 GHz, a microwave power is 500 W to 75000 W, a temperature is 25° C. to 600° C., and a deposition time is less than 30 minutes. The microwave plasma chemical vapor deposition process includes the following. Inert gas or stable gas is passed in. Hydrocarbon gas and hydrogen are passed in. Microwaves are applied to generate plasma. The hydrocarbon gas and the hydrogen are ionized. Nanographene is formed on the substrate.

公开(公告)号：US20250157746A1

公开(公告)日：2025-05-15

申请号：US18404833

申请日：2024-01-04

Applicant: Industrial Technology Research Institute

Inventor： Hung-Hsin Shih ,  Kun-Ping Huang ,  Chi-Chang Hu ,  Da-Je Hsu ,  Chen-Wei Tai

IPC: H01G11/86 ,  C01B32/186 ,  C01B32/194 ,  C23C16/26 ,  C23C16/511 ,  C23C16/56 ,  H01G11/32

Abstract: A manufacturing method of an electrode of an energy storage element includes: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls. A volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. An electrode of an energy storage element is also provided.