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公开(公告)号：US09400224B2
公开(公告)日：2016-07-26
申请号：US14485082
申请日：2014-09-12
CPC分类号： B81B3/00 , G01L9/0073 , G01L11/04 , H04R1/28 , H04R19/005 , H04R31/00
摘要： A pressure sensor and a manufacturing method of the same are provided. The pressure sensor includes a substrate, a dielectric oxide layer, a first electrode, a dielectric connection layer, and a second electrode. The dielectric oxide layer is formed on the substrate. The first electrode is formed on the dielectric oxide layer. The dielectric connection layer is formed on the first electrode. The second electrode is formed on the dielectric connection layer. The second electrode comprises a patterned conductive layer and a dielectric layer. The patterned conductive layer has a plurality of holes, and the dielectric layer is formed on the patterned conductive layer and covers the inner walls of the plurality of holes. The first electrode, the dielectric connection layer, and the second electrode define a first chamber between the first electrode and the second electrode.
摘要翻译： 提供了一种压力传感器及其制造方法。 压力传感器包括基板，电介质氧化物层，第一电极，电介质连接层和第二电极。 电介质氧化物层形成在基板上。 第一电极形成在电介质氧化物层上。 介电连接层形成在第一电极上。 第二电极形成在电介质连接层上。 第二电极包括图案化导电层和电介质层。 图案化导电层具有多个孔，并且介电层形成在图案化导电层上并覆盖多个孔的内壁。 第一电极，电介质连接层和第二电极在第一电极和第二电极之间限定第一室。
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公开(公告)号：US20160076959A1
公开(公告)日：2016-03-17
申请号：US14485082
申请日：2014-09-12
CPC分类号： B81B3/00 , G01L9/0073 , G01L11/04 , H04R1/28 , H04R19/005 , H04R31/00
摘要： A pressure sensor and a manufacturing method of the same are provided. The pressure sensor includes a substrate, a dielectric oxide layer, a first electrode, a dielectric connection layer, and a second electrode. The dielectric oxide layer is formed on the substrate. The first electrode is formed on the dielectric oxide layer. The dielectric connection layer is formed on the first electrode. The second electrode is formed on the dielectric connection layer. The second electrode comprises a patterned conductive layer and a dielectric layer. The patterned conductive layer has a plurality of holes, and the dielectric layer is formed on the patterned conductive layer and covers the inner walls of the plurality of holes. The first electrode, the dielectric connection layer, and the second electrode define a first chamber between the first electrode and the second electrode.
摘要翻译： 提供了一种压力传感器及其制造方法。 压力传感器包括基板，电介质氧化物层，第一电极，电介质连接层和第二电极。 电介质氧化物层形成在基板上。 第一电极形成在电介质氧化物层上。 介电连接层形成在第一电极上。 第二电极形成在电介质连接层上。 第二电极包括图案化导电层和电介质层。 图案化导电层具有多个孔，并且介电层形成在图案化导电层上并覆盖多个孔的内壁。 第一电极，电介质连接层和第二电极在第一电极和第二电极之间限定第一室。
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