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公开(公告)号：US09400224B2
公开(公告)日：2016-07-26
申请号：US14485082
申请日：2014-09-12
CPC分类号： B81B3/00 , G01L9/0073 , G01L11/04 , H04R1/28 , H04R19/005 , H04R31/00
摘要： A pressure sensor and a manufacturing method of the same are provided. The pressure sensor includes a substrate, a dielectric oxide layer, a first electrode, a dielectric connection layer, and a second electrode. The dielectric oxide layer is formed on the substrate. The first electrode is formed on the dielectric oxide layer. The dielectric connection layer is formed on the first electrode. The second electrode is formed on the dielectric connection layer. The second electrode comprises a patterned conductive layer and a dielectric layer. The patterned conductive layer has a plurality of holes, and the dielectric layer is formed on the patterned conductive layer and covers the inner walls of the plurality of holes. The first electrode, the dielectric connection layer, and the second electrode define a first chamber between the first electrode and the second electrode.
摘要翻译： 提供了一种压力传感器及其制造方法。 压力传感器包括基板，电介质氧化物层，第一电极，电介质连接层和第二电极。 电介质氧化物层形成在基板上。 第一电极形成在电介质氧化物层上。 介电连接层形成在第一电极上。 第二电极形成在电介质连接层上。 第二电极包括图案化导电层和电介质层。 图案化导电层具有多个孔，并且介电层形成在图案化导电层上并覆盖多个孔的内壁。 第一电极，电介质连接层和第二电极在第一电极和第二电极之间限定第一室。
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公开(公告)号：US20170139200A1
公开(公告)日：2017-05-18
申请号：US15067195
申请日：2016-03-11
发明人： Chia-Jung Chang , Jing-Yuan Lin , Chun-Kai Mao , Jien-Ming Chen , Yu-Sheng Hsieh
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： A tunable optical device including a substrate, at least one support unit, a flexible frame, an elastic component, a first reflector, and at least one actuator is provided. The support unit is fixed onto the substrate. The flexible frame is connected to the support unit and suspended above the substrate. The elastic component is connected to the flexible frame. A stiffness of the elastic component in the Z-axis is smaller than a stiffness of the flexible frame in the Z-axis. The Z-axis direction is parallel to a normal direction of the substrate. The first reflector is connected to the elastic component. The actuator is located between the flexible frame and the substrate or located between the first reflector and the substrate.
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公开(公告)号：US20160076959A1
公开(公告)日：2016-03-17
申请号：US14485082
申请日：2014-09-12
CPC分类号： B81B3/00 , G01L9/0073 , G01L11/04 , H04R1/28 , H04R19/005 , H04R31/00
摘要： A pressure sensor and a manufacturing method of the same are provided. The pressure sensor includes a substrate, a dielectric oxide layer, a first electrode, a dielectric connection layer, and a second electrode. The dielectric oxide layer is formed on the substrate. The first electrode is formed on the dielectric oxide layer. The dielectric connection layer is formed on the first electrode. The second electrode is formed on the dielectric connection layer. The second electrode comprises a patterned conductive layer and a dielectric layer. The patterned conductive layer has a plurality of holes, and the dielectric layer is formed on the patterned conductive layer and covers the inner walls of the plurality of holes. The first electrode, the dielectric connection layer, and the second electrode define a first chamber between the first electrode and the second electrode.
摘要翻译： 提供了一种压力传感器及其制造方法。 压力传感器包括基板，电介质氧化物层，第一电极，电介质连接层和第二电极。 电介质氧化物层形成在基板上。 第一电极形成在电介质氧化物层上。 介电连接层形成在第一电极上。 第二电极形成在电介质连接层上。 第二电极包括图案化导电层和电介质层。 图案化导电层具有多个孔，并且介电层形成在图案化导电层上并覆盖多个孔的内壁。 第一电极，电介质连接层和第二电极在第一电极和第二电极之间限定第一室。
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公开(公告)号：US11137590B2
公开(公告)日：2021-10-05
申请号：US15067195
申请日：2016-03-11
发明人： Chia-Jung Chang , Jing-Yuan Lin , Chun-Kai Mao , Jien-Ming Chen , Yu-Sheng Hsieh
IPC分类号： G02B26/00
摘要： A tunable optical device including a substrate, at least one support unit, a flexible frame, an elastic component, a first reflector, and at least one actuator is provided. The support unit is fixed onto the substrate. The flexible frame is connected to the support unit and suspended above the substrate. The elastic component is connected to the flexible frame. A stiffness of the elastic component in the Z-axis is smaller than a stiffness of the flexible frame in the Z-axis. The Z-axis direction is parallel to a normal direction of the substrate. The first reflector is connected to the elastic component. The actuator is located between the flexible frame and the substrate or located between the first reflector and the substrate.
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公开(公告)号：US09236275B2
公开(公告)日：2016-01-12
申请号：US13661690
申请日：2012-10-26
发明人： Chien-Nan Yeh , Chin-Hung Wang , Hsin-Li Lee , Jien-Ming Chen , Tzong-Che Ho , Li-Chi Pan
CPC分类号： H01L21/56 , B81B7/0061 , B81B2201/0257 , B81B2207/012 , B81B2207/096 , H01L2224/48091 , H01L2224/48137 , H01L2224/73265 , H01L2924/1461 , H01L2924/3025 , H04R19/005 , H04R31/006 , H04R2499/11 , H04R2499/15 , H01L2924/00014 , H01L2924/00
摘要： A MEMS acoustic transducer is provided, which includes a substrate, a MEMS chip, and a housing. The substrate has a first opening area and a lower electrode layer disposed over a surface of the substrate, wherein the first opening area includes at least one hole allowing acoustic pressure to enter the MEMS acoustic transducer. The MEMS chip is disposed over the surface of the substrate, including a second opening area and an upper electrode layer partially sealing the second opening area, wherein the upper electrode layer and the lower electrode layer, which are parallel to each other and have a gap therebetween, form an induction capacitor. The housing is disposed over the MEMS chip or the surface of the substrate creating a cavity with the MEMS chip or the substrate. In addition, a method for fabricating the above MEMS acoustic transducer is also provided.
摘要翻译： 提供了一种MEMS声换能器，其包括基板，MEMS芯片和壳体。 衬底具有设置在衬底的表面上的第一开口区域和下部电极层，其中第一开口区域包括允许声压进入MEMS声学换能器的至少一个孔。 MEMS芯片设置在基板的表面上，包括第二开口区域和部分地密封第二开口区域的上电极层，其中上电极层和下电极层彼此平行并且具有间隙 之间形成感应电容器。 壳体设置在MEMS芯片或衬底的表面上，从而产生具有MEMS芯片或衬底的空腔。 此外，还提供了一种用于制造上述MEMS声换能器的方法。
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