公开(公告)号：US20180190516A1

公开(公告)日：2018-07-05

申请号：US15786508

申请日：2017-10-17

Applicant: Industrial Technology Research Institute

Inventor： Yuh-Shyang Chen ,  Te-Yi Chang

IPC: H01L21/67 ,  B01F3/08 ,  C08K9/04 ,  B41J2/01 ,  H01L21/677

CPC classification number: H01L21/67017 ,  B01F3/0811 ,  B01J2219/00164 ,  B05C5/0254 ,  B05C11/1018 ,  B05C11/1023 ,  B05D1/26 ,  B05D7/24 ,  B41J2/01 ,  C08K9/04 ,  H01L21/6715 ,  H01L21/677

Abstract: A coating method of a non-Newtonian fluid material and a coating system thereof are provided. The coating method includes the following steps. An equation of shear rate and shear viscosity of the non-Newtonian fluid material represented by equation (1) is obtained: η = η 0  γ . ( n - 1 ) , ( 1 ) wherein η is shear viscosity, η0 is zero shear viscosity, {dot over (γ)} is shear rate, and n is power-law index. An initial gap between a coating apparatus and a substrate and a thickness of a film of the non-Newtonian fluid material to be formed are set. The non-Newtonian fluid material is coated on the substrate in a non-constant coating velocity manner using the coating apparatus. The shear viscosity of the non-Newtonian fluid material is obtained from equation (1) according to the coating velocity and thickness of the non-Newtonian fluid material. The gap between the coating apparatus and the substrate is adjusted according to the shear viscosity, coating velocity, and thickness.