公开(公告)号：US10761140B2

公开(公告)日：2020-09-01

申请号：US16038223

申请日：2018-07-18

Applicant: Infineon Technologies AG

Inventor： Oliver Frank ,  Christoph Hazott ,  Georg Krebelder ,  Bruno Mariacher ,  Otto Pfabigan ,  Sebastian Pointner ,  Ralf Reiterer ,  Florian Starzer

IPC: G01R31/319 ,  G06F30/33 ,  G06F30/327 ,  G01R31/317 ,  H01L21/66

Abstract: A method for producing a semiconductor device is described. In accordance with one example embodiment, the method comprises providing a virtual DUT in the form of a behavior model of the semiconductor device and developing at least one test in a test development environment for an automatic test equipment (ATE). In this case, commands are generated by means of the test development environment, which commands are converted into test signals by means of a software interface, which test signals are fed to the virtual DUT and are processable by the latter. The software interface processes response signals of the virtual DUT and reports information dependent on the response signals back to the test development environment.