公开(公告)号：US09640363B2

公开(公告)日：2017-05-02

申请号：US15282028

申请日：2016-09-30

申请人： Institute Of Physics, Chinese Academy Of Sciences

发明人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC分类号： H01J37/09 ,  H01F41/00 ,  G01R33/09 ,  H01L43/12 ,  H01F7/20 ,  H01J37/141

CPC分类号： H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

摘要： A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device, which comprises a power supply, a magnetic-field generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, which is wound on the soft iron core to generate a magnetic field. The soft iron core is of a semi-closed frame structure and the magnetic poles are at the ends of the frame structure. The stage is inside a vacuum chamber. The poles are oppositely arranged inside the vacuum chamber relative to the stage. The coil and the soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the stage and apply a local magnetic field.

公开(公告)号：US20170018395A1

公开(公告)日：2017-01-19

申请号：US15282028

申请日：2016-09-30

申请人： Institute Of Physics, Chinese Academy Of Sciences

发明人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

IPC分类号： H01J37/09 ,  H01J37/141 ,  H01F7/20

CPC分类号： H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

摘要： A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device, which comprises a power supply, a magnetic-field generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, which is wound on the soft iron core to generate a magnetic field. The soft iron core is of a semi-closed frame structure and the magnetic poles are at the ends of the frame structure. The stage is inside a vacuum chamber. The poles are oppositely arranged inside the vacuum chamber relative to the stage. The coil and the soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the stage and apply a local magnetic field.

摘要翻译： 纳米图案系统包括真空室，样品台和磁场施加装置，其包括电源，磁场产生装置和一对磁极。 磁场产生装置包括线圈和导磁软铁芯。 电源连接到卷绕在软铁芯上的线圈，以产生磁场。 软铁芯为半闭框架结构，磁极位于框架结构的两端。 舞台在真空室内。 极相对于真空室相对地布置在真空室内。 线圈和软铁芯在真空室外。 软铁芯将线圈产生的磁场引入真空室。 磁极将样品放在载物台上并施加局部磁场。