公开(公告)号：US20230358690A1

公开(公告)日：2023-11-09

申请号：US17737045

申请日：2022-05-05

Applicant: Intel Corporation

Inventor： Jianyong MO ,  Fan FAN ,  Liang ZHANG

IPC: G01N21/956 ,  H04N5/247 ,  G01N21/95

CPC classification number: G01N21/956 ,  H04N5/247 ,  G01N21/9501

Abstract: An optical inspection tool may include at least a first image capture unit and a second image capture unit for inspecting specimens having a substantially V-shaped grooves. The first image capture unit may be arranged in a first orientation so as to be directable towards a first angular surface of the V-shaped groove of each specimen. The second image capture unit may be arranged in a second orientation so as to be directable towards a second angular surface of the V-shaped groove of each specimen. The first image capture unit may be configured to capture images of defects and/or contamination on the first angular surface and the second image capture unit may be configured to capture images of defects and/or contamination on the second angular surface.

公开(公告)号：US20230314682A1

公开(公告)日：2023-10-05

申请号：US17706654

申请日：2022-03-29

Applicant: Intel Corporation

Inventor： Jacob CHESNA ,  Liang ZHANG ,  Jianyong MO ,  Fan FAN

IPC: G02B5/30 ,  G02B5/20 ,  G02B5/26 ,  G01L1/24

CPC classification number: G02B5/3066 ,  G02B5/305 ,  G02B5/208 ,  G02B5/26 ,  G01L1/248

Abstract: An apparatus includes a light source configured to emit light to a translucent material and an embedded feature disposed in the translucent material, a first linear polarizer configured to linearly polarize the emitted light, based on a first orientation of an optical axis of the first linear polarizer, and a second linear polarizer configured to filter the light that is reflected from the translucent material, from the light that is reflected from the embedded feature and the translucent material, based on a second orientation of an optical axis of the second linear polarizer. The apparatus further includes a sensor configured to receive the light reflected from the embedded feature, from which the light reflected from the translucent material is filtered, and capture an image of the embedded feature and the translucent material, based on the received light.