DEVICES AND METHODS TO MINIMIZE DIE SHIFT IN EMBEDDED HETEROGENEOUS ARCHITECTURES

    公开(公告)号:US20230078395A1

    公开(公告)日:2023-03-16

    申请号:US17472048

    申请日:2021-09-10

    申请人: Intel Corporation

    IPC分类号: H01L23/00 H01L23/31

    摘要: Disclosed herein are embedded heterogeneous architectures having minimized die shift and methods for manufacturing the same. The architectures may include a substrate, a bridge, and a material attached to the substrate. The substrate may include a first subset of vias and a second subset of vias. The bridge may be located in between the first subset and the second subset of vias. The material may include a first portion located proximate the first subset of vias, and a second portion located proximate the second subset of vias. The first and second portions may define a partial boundary of a cavity formed within the substrate and the bridge may be located within the cavity.