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公开(公告)号:US20170162676A1
公开(公告)日:2017-06-08
申请号:US15434981
申请日:2017-02-16
Applicant: Intel Corporation
Inventor: Annalisa CAPPELLANI , Stephen M. CEA , Tahir GHANI , Harry GOMEZ , Jack T. KAVALIEROS , Patrick H. KEYS , Seiyon KIM , Kelin J. KUHN , Aaron D. LILAK , Rafael RIOS , Mayank SAHNI
IPC: H01L29/66 , H01L21/762 , H01L29/423 , H01L29/06 , H01L29/78
CPC classification number: H01L29/66818 , B82Y10/00 , H01L21/762 , H01L21/76216 , H01L27/1203 , H01L29/0649 , H01L29/0653 , H01L29/0673 , H01L29/42392 , H01L29/66795 , H01L29/775 , H01L29/785
Abstract: Semiconductor devices with isolated body portions are described. For example, a semiconductor structure includes a semiconductor body disposed above a semiconductor substrate. The semiconductor body includes a channel region and a pair of source and drain regions on either side of the channel region. An isolation pedestal is disposed between the semiconductor body and the semiconductor substrate. A gate electrode stack at least partially surrounds a portion of the channel region of the semiconductor body.