公开(公告)号：US20230317408A1

公开(公告)日：2023-10-05

申请号：US17711785

申请日：2022-04-01

申请人： Intel Corporation

发明人： Xianghong Tong ,  Martin Von Haartman ,  Wen-Hsien Chuang ,  Zhiyong Ma ,  Hyuk Ju Ryu ,  Prasoon Joshi ,  May Ling Oh ,  Jennifer Huening ,  Shuai Zhao ,  Charles Peterson ,  Ira Jewell ,  Hasan Faraby

IPC分类号： H01J37/26 ,  H01J37/28 ,  H01J37/244

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2814 ,  H01J2237/2801 ,  H01J2237/221

摘要： Pulsed beam prober systems, devices, and techniques are described herein related to providing a beam detection frequency that is less than a electrical test frequency. An electrical test signal at the electrical test frequency is provided to die under test. A pulsed beam is applied to the die such that the pulsed beam has packets of beam pulses or a frequency delta with respect to the electrical test frequency. The packets of beam pulses or the frequency delta elicits a detectable beam modulation in an imaging signal reflected from the die such that the imaging signal is modulated at a detection frequency less than the electrical test frequency.