公开(公告)号：US20220285278A1

公开(公告)日：2022-09-08

申请号：US17752717

申请日：2022-05-24

Applicant: Intel Corporation

Inventor： Jeremy D. ECTON ,  Hiroki TANAKA ,  Oscar OJEDA ,  Arnab ROY ,  Vahidreza PARICHEHREH ,  Leonel R. ARANA ,  Chung Kwang TAN ,  Robert A. MAY

IPC: H01L23/538 ,  H01L21/48

Abstract: Embodiments include a package structure with one or more layers of dielectric material, where an interconnect bridge substrate is embedded within the dielectric material. One or more via structures are on a first surface of the embedded substrate, where individual ones of the via structures comprise a conductive material and have a tapered profile. The conductive material is also on a sidewall of the embedded substrate.