公开(公告)号：US20130166088A1

公开(公告)日：2013-06-27

申请号：US13738729

申请日：2013-01-10

Applicant: Intermolecular Inc.

Inventor： Brian K. Hatcher ,  Kent Riley Child

IPC: G05F5/00

CPC classification number: H01J37/3464 ,  G05F5/00 ,  H01J37/32366 ,  H01J37/32651 ,  H01J37/32706 ,  H01J37/34 ,  H01J37/3444 ,  H01J37/3447 ,  H02J1/10

Abstract: A system and method for combinatorial processing of substrates in a processing chamber. The system includes a plurality of generators for supplying power into the processing chamber. A plurality of sputter guns provides power to different regions of a substrate. A switchbox switches power from a generator to a sputter gun via a plurality of coaxial switches. A controller positioned within the switchbox automatically distributes power from a specific generator to a specific sputter gun under programmable logic control.