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公开(公告)号：US20190018043A1
公开(公告)日：2019-01-17
申请号：US15649762
申请日：2017-07-14
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Roland Dieterle , Siegfried Tomaschko
Abstract: An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.
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公开(公告)号：US10082419B1
公开(公告)日：2018-09-25
申请号：US15858324
申请日：2017-12-29
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Siegfried Tomaschko , Roland Dieterle
CPC classification number: G01G3/1414 , F16M11/00 , F16M13/00 , G01B5/14 , G01B5/24 , G03F9/7015 , G03F9/703
Abstract: The disclosure relates to an adjustable load transmitter for adjusting an alignment between planar members separated from each other by a gap. The load transmitter comprises a set of plates to be received inside the gap, the set comprising two rotatable plates and being adapted for transmitting a load via a load transmission path between the planar members. The load transmission path comprises the rotatable plates. Each of the plates comprises two flat, non-parallel contact faces, and one of the contact faces of the first rotatable plate is in permanent surface contact with one of the contact faces of the second rotatable plate. The rotatable plates are adapted for being rotated relative to each other around one of their respective normal axes.
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公开(公告)号：US10345136B2
公开(公告)日：2019-07-09
申请号：US15649809
申请日：2017-07-14
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Siegfried Tomaschko , Roland Dieterle
Abstract: The disclosure relates to an adjustable load transmitter for adjusting an alignment between planar members separated from each other by a gap. The load transmitter comprises a set of plates to be received inside the gap, the set comprising two rotatable plates and being adapted for transmitting a load via a load transmission path between the planar members. The load transmission path comprises the rotatable plates. Each of the plates comprises two flat, non-parallel contact faces, and one of the contact faces of the first rotatable plate is in permanent surface contact with one of the contact faces of the second rotatable plate. The rotatable plates are adapted for being rotated relative to each other around one of their respective normal axes.
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公开(公告)号：US20190017861A1
公开(公告)日：2019-01-17
申请号：US15649809
申请日：2017-07-14
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Siegfried Tomaschko , Roland Dieterle
CPC classification number: G01G3/1414 , F16M11/00 , F16M13/00 , G01B5/14 , G01B5/24 , G03F9/7015 , G03F9/703
Abstract: The disclosure relates to an adjustable load transmitter for adjusting an alignment between planar members separated from each other by a gap. The load transmitter comprises a set of plates to be received inside the gap, the set comprising two rotatable plates and being adapted for transmitting a load via a load transmission path between the planar members. The load transmission path comprises the rotatable plates. Each of the plates comprises two flat, non-parallel contact faces, and one of the contact faces of the first rotatable plate is in permanent surface contact with one of the contact faces of the second rotatable plate. The rotatable plates are adapted for being rotated relative to each other around one of their respective normal axes.
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公开(公告)号：US10955440B2
公开(公告)日：2021-03-23
申请号：US16561191
申请日：2019-09-05
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Roland Dieterle , Siegfried Tomaschko
Abstract: An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.
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Patent Agency Ranking
公开(公告)号：US10605649B2
公开(公告)日：2020-03-31
申请号：US16353129
申请日：2019-03-14
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Siegfried Tomaschko , Roland Dieterle
Abstract: The disclosure relates to an adjustable load transmitter for adjusting an alignment between planar members separated from each other by a gap. The load transmitter comprises a set of plates to be received inside the gap, the set comprising two rotatable plates and being adapted for transmitting a load via a load transmission path between the planar members. The load transmission path comprises the rotatable plates. Each of the plates comprises two flat, non-parallel contact faces, and one of the contact faces of the first rotatable plate is in permanent surface contact with one of the contact faces of the second rotatable plate. The rotatable plates are adapted for being rotated relative to each other around one of their respective normal axes.
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公开(公告)号：US20190204138A1
公开(公告)日：2019-07-04
申请号：US16353129
申请日：2019-03-14
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Siegfried Tomaschko , Roland Dieterle
CPC classification number: G01G3/1414 , F16M11/00 , F16M13/00 , G01B5/14 , G01B5/24 , G03F9/7015 , G03F9/703
Abstract: The disclosure relates to an adjustable load transmitter for adjusting an alignment between planar members separated from each other by a gap. The load transmitter comprises a set of plates to be received inside the gap, the set comprising two rotatable plates and being adapted for transmitting a load via a load transmission path between the planar members. The load transmission path comprises the rotatable plates. Each of the plates comprises two flat, non-parallel contact faces, and one of the contact faces of the first rotatable plate is in permanent surface contact with one of the contact faces of the second rotatable plate. The rotatable plates are adapted for being rotated relative to each other around one of their respective normal axes.
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公开(公告)号：US10527649B2
公开(公告)日：2020-01-07
申请号：US15649762
申请日：2017-07-14
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Roland Dieterle , Siegfried Tomaschko
Abstract: An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.
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公开(公告)号：US20190391179A1
公开(公告)日：2019-12-26
申请号：US16561191
申请日：2019-09-05
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Roland Dieterle , Siegfried Tomaschko
Abstract: An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.
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公开(公告)号：US10422817B2
公开(公告)日：2019-09-24
申请号：US15795307
申请日：2017-10-27
Applicant: International Business Machines Corporation
Inventor： Martin Eckert , Roland Dieterle , Siegfried Tomaschko
Abstract: An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.
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