公开(公告)号：US20190027635A1

公开(公告)日：2019-01-24

申请号：US16040387

申请日：2018-07-19

Applicant: Intevac, Inc.

Inventor： Hoang Huy Vu ,  Babak Adibi ,  Terry Bluck

IPC: H01L31/18 ,  H01J37/317 ,  H01J37/20 ,  H01L31/0203

Abstract: A system for transporting substrates and precisely align the substrates horizontally and vertically. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of chuck assemblies are loosely positioned, each of the chuck assemblies includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. A pedestal is configured to freely slide on the base. The pedestal includes a set of horizontal alignment wheels that precisely align the pedestal in the horizontal direction. An electrostatic chuck is magnetically held to the pedestal.

公开(公告)号：US10854772B2

公开(公告)日：2020-12-01

申请号：US16040387

申请日：2018-07-19

Applicant: Intevac, Inc.

Inventor： Hoang Huy Vu ,  Babak Adibi ,  Terry Bluck

IPC: H01L31/18 ,  H01J37/317 ,  H01L31/0203 ,  H01J37/20

Abstract: A system for transporting substrates and precisely align the substrates horizontally and vertically. The system decouples the functions of transporting the substrates, vertically aligning the substrates, and horizontally aligning the substrates. The transport system includes a carriage upon which plurality of chuck assemblies are loosely positioned, each of the chuck assemblies includes a base having vertical alignment wheels to place the substrate in precise vertical alignment. A pedestal is configured to freely slide on the base. The pedestal includes a set of horizontal alignment wheels that precisely align the pedestal in the horizontal direction. An electrostatic chuck is magnetically held to the pedestal.