公开(公告)号：US20180017385A1

公开(公告)日：2018-01-18

申请号：US15265740

申请日：2016-09-14

Applicant: InvenSense, Inc.

Inventor： Alireza Shirvani ,  Michael Perrott

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5776

Abstract: A device includes a proof mass of a sensor, capacitive elements, an electrode circuitry, a time multiplexing circuitry, a sense circuitry, and a force feedback circuitry. The proof mass moves from a first position to a second position responsive to an external actuation. The capacitive elements change capacitive charge in response thereto. The electrode circuitry coupled to the capacitive elements generates a charge signal. The time multiplexing circuitry pass the charge signal during a sensing time period and prevents the charge signal from passing through during a forcing time period. The sense circuitry generates a sensed signal from the charge signal. The force feedback circuitry applies a charge associated with the sensed signal to the electrode circuitry during the forcing time period. The electrode circuitry applies the charge received from the force feedback circuitry to the capacitive elements, moving the proof mass from the second position to another position.

公开(公告)号：US10852135B2

公开(公告)日：2020-12-01

申请号：US16514368

申请日：2019-07-17

Applicant: InvenSense, Inc.

Inventor： Alireza Shirvani ,  Michael Perrott

IPC: G01C19/56

Abstract: A device includes a proof mass of a sensor, capacitive elements, an electrode circuitry, a time multiplexing circuitry, a sense circuitry, and a force feedback circuitry. The proof mass moves from a first position to a second position responsive to an external actuation. The capacitive elements change capacitive charge in response thereto. The electrode circuitry coupled to the capacitive elements generates a charge signal. The time multiplexing circuitry pass the charge signal during a sensing time period and prevents the charge signal from passing through during a forcing time period. The sense circuitry generates a sensed signal from the charge signal. The force feedback circuitry applies a charge associated with the sensed signal to the electrode circuitry during the forcing time period. The electrode circuitry applies the charge received from the force feedback circuitry to the capacitive elements, moving the proof mass from the second position to another position.

公开(公告)号：US10538427B2

公开(公告)日：2020-01-21

申请号：US15682408

申请日：2017-08-21

Applicant: InvenSense, Inc.

Inventor： Alireza Shirvani ,  Sagar Kumar

IPC: G01C19/5762 ,  B81B3/00 ,  H03H3/007 ,  H03H9/02 ,  H01L21/768 ,  H01G5/40 ,  G01P15/097 ,  G01P15/125 ,  G01C19/5656

Abstract: In some embodiments, a micro electro mechanical system (MEMS) includes a proof mass, sense electrodes, sense circuitry, and a frequency matching circuitry. The proof mass is configured to move responsive to stimuli. The sense electrodes are configured to generate a signal responsive to the proof mass moving. The sense circuitry is coupled to the sense electrodes. The sense circuitry is configured to receive the generated signal and further configured to process the generated signal. The frequency matching circuitry is configured to apply a DC voltage to the sense electrodes. The DC voltage is configured to change a stiffness of a spring of the proof mass. According to some embodiments, the change in the stiffness of the spring matches a resonance frequency between a sense mode and a drive mode. According to some embodiments, the sense electrodes are a comb structure.

公开(公告)号：US10393522B2

公开(公告)日：2019-08-27

申请号：US15265740

申请日：2016-09-14

Applicant: InvenSense, Inc.

Inventor： Alireza Shirvani ,  Michael Perrott

IPC: G01C19/56

Abstract: A device includes a proof mass of a sensor, capacitive elements, an electrode circuitry, a time multiplexing circuitry, a sense circuitry, and a force feedback circuitry. The proof mass moves from a first position to a second position responsive to an external actuation. The capacitive elements change capacitive charge in response thereto. The electrode circuitry coupled to the capacitive elements generates a charge signal. The time multiplexing circuitry pass the charge signal during a sensing time period and prevents the charge signal from passing through during a forcing time period. The sense circuitry generates a sensed signal from the charge signal. The force feedback circuitry applies a charge associated with the sensed signal to the electrode circuitry during the forcing time period. The electrode circuitry applies the charge received from the force feedback circuitry to the capacitive elements, moving the proof mass from the second position to another position.