公开(公告)号：US10161817B2

公开(公告)日：2018-12-25

申请号：US14521918

申请日：2014-10-23

申请人： InvenSense, Inc.

发明人： Felix Mayer ,  Marc Von Waldkirch ,  Johannes Buhler ,  Rene Hummel ,  Stephan Braun ,  Marion Hermersdorf ,  Chung-Hsien Lin

IPC分类号： G01L7/02 ,  H01L21/76 ,  G01L19/14 ,  B81B7/00

摘要： A pressure sensor comprises a first substrate containing a processing circuit integrated thereon and a cap attached to the first substrate. The cap includes a container, a holder, and one or more suspension elements for suspending the container from the holder. The container includes a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. The container is suspended from the holder such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit.