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7 条记录 (耗时 0.018 秒)

    Reduced stress pressure sensor
    2.
    发明授权
    Reduced stress pressure sensor 有权

    公开(公告)号：US10161817B2

    公开(公告)日：2018-12-25

    申请号：US14521918

    申请日：2014-10-23

    申请人： InvenSense, Inc.

    发明人： Felix Mayer ,  Marc Von Waldkirch ,  Johannes Buhler ,  Rene Hummel ,  Stephan Braun ,  Marion Hermersdorf ,  Chung-Hsien Lin

    IPC分类号： G01L7/02 ,  H01L21/76 ,  G01L19/14 ,  B81B7/00

    摘要： A pressure sensor comprises a first substrate containing a processing circuit integrated thereon and a cap attached to the first substrate. The cap includes a container, a holder, and one or more suspension elements for suspending the container from the holder. The container includes a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. The container is suspended from the holder such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit.

    Pressure sensor
    5.
    发明授权
    Pressure sensor 有权

    公开(公告)号：US10816422B2

    公开(公告)日：2020-10-27

    申请号：US15442468

    申请日：2017-02-24

    申请人： InvenSense, Inc.

    发明人： Chung-Hsien Lin ,  Rene Hummel ,  Ulrich Bartsch ,  Marion Hermersdorf ,  Tsung Lin Tang ,  Wang Shen Su ,  Chia Min Lin

    IPC分类号： G01L9/00 ,  G01L19/00 ,  G01L19/14 ,  B81B7/00 ,  B23P19/04 ,  G01L9/12

    摘要： A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

    Pressure sensor with deformable membrane and method of manufacture
    7.
    发明授权
    Pressure sensor with deformable membrane and method of manufacture 有权
    具有可变形膜的压力传感器及其制造方法

    公开(公告)号：US09581512B2

    公开(公告)日：2017-02-28

    申请号：US14522014

    申请日：2014-10-23

    申请人： InvenSense, Inc.

    发明人： Chung-Hsien Lin ,  Rene Hummel ,  Ulrich Bartsch ,  Marion Hermersdorf ,  Tsung Lin Tang ,  Wang Shen Su ,  Chia Min Lin

    IPC分类号： G01L9/00 ,  G01L19/00 ,  B23P19/04 ,  G01L9/12 ,  G01L19/14 ,  B81B7/00

    CPC分类号： G01L9/0073 ,  B23P19/04 ,  B81B7/0051 ,  B81B7/0054 ,  B81B2201/0264 ,  B81B2207/012 ,  B81B2207/095 ,  B81C2203/0792 ,  G01L9/12 ,  G01L19/0084 ,  G01L19/145 ,  G01L19/146 ,  Y10T29/49165 ,  Y10T29/49904

    摘要： A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

    摘要翻译： 压力传感器包括第一基板和附接到第一基板的盖。 盖包括处理电路，空腔和分离空腔的可变形膜和通向压力传感器外部的端口。 提供感测装置，用于将可变形膜的响应转换成端口处的压力，使其成为能够被处理电路处理的信号。 盖子附接到第一基板，使得可变形膜面向第一基板，并且使得在可变形膜和第一基板之间提供间隙，该间隙有助于端口。 第一基板包括盖附接的支撑部分，用于将压力传感器电连接到外部装置的接触部分以及用于将支撑部分从接触部分悬挂的一个或多个悬挂元件。