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公开(公告)号：US20230296461A1
公开(公告)日：2023-09-21
申请号：US18113541
申请日：2023-02-23
Applicant: InvenSense, Inc.
Inventor： Yoshitaka Sasaki , Jotaro Akiyama , Sal Akram , Yaoching Wang , Weng Shen Su , Tsung Lin Tang , Ting-Yuan Liu , Yuki Shibano , Chung-Hsien Lin
CPC classification number: G01L9/12 , B81C1/00198 , B81C2201/0132
Abstract: A pressure sensor includes a first electrode, a plurality of cavities, and a second electrode. The second electrode is disposed opposite the first electrode through the plurality of cavities. The second electrode includes a flat structure spanning two adjacent cavities of the plurality of cavities.
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