公开(公告)号：US20240183877A1

公开(公告)日：2024-06-06

申请号：US18495096

申请日：2023-10-26

申请人： InvenSense, Inc.

发明人： Adolfo Giambastiani ,  Luca Coronato ,  Edoardo Belloni ,  Stefano Dellea ,  Yaoching Wang ,  Giacomo Gafforelli

IPC分类号： G01P15/12 ,  G01P1/00 ,  G01P15/18 ,  G01P21/00

CPC分类号： G01P15/12 ,  G01P1/00 ,  G01P15/18 ,  G01P21/00

摘要： A MEMS accelerometer package includes multiple cavities such that a change in pressure corresponding to a breach in one or more of the cavities is readily identified based on the output of a pressure-sensitive sensor such as a MEMS resonator. One or more mitigations may be initiated in response to the identification of the change in pressure.