公开(公告)号：US4214166A

公开(公告)日：1980-07-22

申请号：US890922

申请日：1978-03-28

申请人： Isolde Dietrich ,  Fred Fox ,  Erwin Knapek ,  Karl Nachtrieb ,  Reinhard Weyl ,  Helmut Zerbst ,  Guy Lefranc

发明人： Isolde Dietrich ,  Fred Fox ,  Erwin Knapek ,  Karl Nachtrieb ,  Reinhard Weyl ,  Helmut Zerbst ,  Guy Lefranc

IPC分类号： H01J37/141 ,  H01J37/244 ,  G01N23/00

CPC分类号： H01J37/244 ,  H01J37/1416 ,  H01J2237/2442 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24585 ,  Y10S505/871

摘要： A magnetic lens system for corpuscular radiation equipment operating in a vacuum, in particular, an objective lens system for electron microscopes, comprising a superconducting shield housing, in which are arranged, at one end, a single hollow cylindrical superconducting shielding device, wound with a lens coil, and at the other end, in front of the free end face of the shielding device, a vacuum chamber for accommodating an object to be examined, permitting the cavity to be relatively large, and detectors for radiation analysis to be arranged therein so that the lens system is therefore suitable for use in scanning electron microscopes.

摘要翻译： 一种用于在真空中操作的红外辐射设备的磁性透镜系统，特别是用于电子显微镜的物镜系统，其包括一个超导屏蔽壳体，其中在其一端设有单个空心圆柱形超导屏蔽装置， 透镜线圈，另一端位于屏蔽装置的自由端面的前方，用于容纳被检查物体的真空室，允许空腔相对较大，并且其中布置有放射线分析用检测器 因此，透镜系统因此适用于扫描电子显微镜。

公开(公告)号：US4209701A

公开(公告)日：1980-06-24

申请号：US891894

申请日：1978-03-30

申请人： Isolde Dietrich ,  Fred Fox ,  Erwin Knapek ,  Karl Nachtrieb ,  Reinhard Weyl ,  Helmut Zerbst ,  Guy LeFranc

发明人： Isolde Dietrich ,  Fred Fox ,  Erwin Knapek ,  Karl Nachtrieb ,  Reinhard Weyl ,  Helmut Zerbst ,  Guy LeFranc

IPC分类号： H01J37/141 ,  H01J37/26 ,  H01J37/00

CPC分类号： H01J37/1416 ,  Y10S505/871

摘要： A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is achieved by an arrangement which includes a vacuum chamber having a lens coil winding, a superconductive shielding device which is of cup-shaped design and encloses the winding, two superconductive shielding cylinders disposed one behind the other with mutual spacing enclosed by the winding, with a vacuum chamber for the object to be examined disposed in front of the open side of the shielding device and the first shielding cylinder.

摘要翻译： 一种用于在真空下工作的微粒辐射设备的磁性透镜装置，特别是用于高压电子显微镜的物镜，其允许在室温下设置在真空室中的物体被检查，其包括真空室 具有透镜线圈绕组，具有杯形设计并且围绕绕组的超导屏蔽装置，两个超导屏蔽圆筒彼此隔开布置，相互间隔由绕组包围，并设置用于待检测物体的真空室 在屏蔽装置的开口侧和第一屏蔽筒之前。