Corpuscular beam microscope for ring segment focusing
    1.
    发明授权
    Corpuscular beam microscope for ring segment focusing 失效
    球形束显微镜用于环段聚焦

    公开(公告)号:US4214162A

    公开(公告)日:1980-07-22

    申请号:US883005

    申请日:1978-03-03

    摘要: A corpuscular beam microscope for ring segment focusing is provided with aondenser and an objective magnetic lens system which is disposed substantially axially symmetrically about the microscope axis for the purpose of generating two field maxima separated by a distance not exceeding five times the arithmetic means of half the half height widths of the component magnetic fields forming the maxima. The provision of such a magnetic lens system facilitates the elimination of aperture aberrations of the first and second order and the elimination of chromatic aberrations of zero order and partly of the first order as well as certain extra-axial defects.

    摘要翻译: 用于环段聚焦的红外光束显微镜设置有冷凝器和物镜磁透镜系统,该系统基于显微镜轴线基本上轴向对称地设置,用于产生两分频距离不超过半数运算装置的距离的两个场最大值 组成磁场的半高宽度形成最大值。 提供这种磁性透镜系统有助于消除第一阶和第二阶的孔径像差以及消除零级和部分第一阶以及某些特殊轴向缺陷的色像差。

    Magnetic lens arrangement for corpuscular radiation equipment working
under a vacuum
    3.
    发明授权
    Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum 失效
    用于在真空下工作的红外辐射设备的磁性透镜装置

    公开(公告)号:US4209701A

    公开(公告)日:1980-06-24

    申请号:US891894

    申请日:1978-03-30

    CPC分类号: H01J37/1416 Y10S505/871

    摘要: A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is achieved by an arrangement which includes a vacuum chamber having a lens coil winding, a superconductive shielding device which is of cup-shaped design and encloses the winding, two superconductive shielding cylinders disposed one behind the other with mutual spacing enclosed by the winding, with a vacuum chamber for the object to be examined disposed in front of the open side of the shielding device and the first shielding cylinder.

    摘要翻译: 一种用于在真空下工作的微粒辐射设备的磁性透镜装置,特别是用于高压电子显微镜的物镜,其允许在室温下设置在真空室中的物体被检查,其包括真空室 具有透镜线圈绕组,具有杯形设计并且围绕绕组的超导屏蔽装置,两个超导屏蔽圆筒彼此隔开布置,相互间隔由绕组包围,并设置用于待检测物体的真空室 在屏蔽装置的开口侧和第一屏蔽筒之前。

    Magnetic lens assemblies for corpuscular ray devices which operate under vacuum
    5.
    发明授权
    Magnetic lens assemblies for corpuscular ray devices which operate under vacuum 失效
    用于在真空下操作的微波设备的磁性镜头组件

    公开(公告)号:US3900808A

    公开(公告)日:1975-08-19

    申请号:US64862367

    申请日:1967-06-26

    IPC分类号: H01J37/141 H01F7/00

    CPC分类号: H01J37/1416 Y10S505/871

    摘要: A corpuscular ray device having a magnetic lens assembly. Although the invention is particularly applicable to objective lens assemblies of electron microscopes which operate under vacuum, it is also applicable to lens assemblies for ion microscopes, electron-diffraction devices, or other corpuscular ray apparatus wherein the rays are situated in tubular enclosures. The magnetic lens assembly includes a pair of shielding cylinders which are coaxial and spaced from each other, which are made of a superconductive material, and which have their common axis coinciding with a lens axis of the lens assembly, these shielding cylinders being surrounded by a lens winding which may also be made of a superconductive material and which serves to generate the magnetic field which is concentrated by the shielding cylinders in the region of the corpuscular ray. These shielding cylinders have directed toward each other a pair of end faces which are spaced from each other and define between themselves a lens gap which is devoid of any shielding components made of superconductive material. The aperture error constant of the lens assembly depends upon the maximum value of the field intensity in the lens gap and upon the field gradient along the lens axis in the lens gap. The magnitude of the lens gap is chosen in such a way that with a predetermined value of field intensity outwardly beyond the lens gap and the shielding cylinders the maximum value of the field intensity in the lens gap and the field gradient in the lens gap along the lens axis provide for the lens assembly an aperture error constant which is less than a predetermined value of aperture error constant.

    Magnetic lens arrangement
    6.
    发明授权
    Magnetic lens arrangement 失效
    磁性镜片布置

    公开(公告)号:US3708772A

    公开(公告)日:1973-01-02

    申请号:US3708772D

    申请日:1971-11-30

    申请人: SIEMENS AG

    发明人: LE FRANC G

    IPC分类号: H01J37/141 H01F7/00

    CPC分类号: H01J37/1416 Y10S505/871

    摘要: A highly compact magnetic lens arrangement which economically provides the highest field strength on the axis with the minimum beam half width and a minimum outer field strength of the coil winding comprises two tubular shielding cylinder means of superconductive material coaxially aligned with the lens axis, said cylinder means each having a first end and a second end, said first ends being spaced from each other to define a unshielded lens gap therebetween, said lens gap having a coil means positioned about the cylinder means to create a magnetic field, a cooling agent adapted to be present about the cylinder which cause a concentration of the magnetic field adjacent the particle beam, and a ferromagnetic ring-shaped pole shoe on each of said first ends of said cylinders for regulating and guiding the magnetic field.

    摘要翻译: 一种高度紧凑的磁透镜装置,其经济地在轴上提供最高的场强,具有最小的光束半宽度和线圈绕组的最小外场强度,包括两个与透镜轴同轴对准的超导材料的管状屏蔽筒装置,所述圆筒 每个具有第一端和第二端的装置,所述第一端彼此间隔开以限定其间的非屏蔽透镜间隙,所述透镜间隙具有围绕所述气缸装置定位的线圈装置以产生磁场,冷却剂适于 围绕气缸存在,其导致与粒子束相邻的磁场的浓度;以及在所述气缸的每个所述第一端上的铁磁环形极靴,用于调节和引导磁场。

    Edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN
thin film structure
    8.
    发明授权
    Edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure 失效
    利用NbN / MgO / NbN薄膜结构的边缘几何超导隧道结

    公开(公告)号:US5099294A

    公开(公告)日:1992-03-24

    申请号:US641798

    申请日:1991-01-16

    IPC分类号: H01L39/22 H01L39/24

    摘要: An edge defined geometry is used to produce very small area tunnel junctions (30) in a structure with niobium nitride superconducting electrodes (14, 28) and a magnesium oxide tunnel barrier (24). The incorporation of an MgO tunnel barrier with two NbN electrodes results in improved current-voltage characteristics, and may lead to better junction noise characteristics. The NbN electrodes are preferably sputter-deposited, with the first NbN electrode deposited on an insulating substrate maintained at about 250.degree. to 500.degree. C. for improved quality of the electrode.

    摘要翻译: 使用边缘限定的几何形状在具有铌氮化物超导电极(14,28)和氧化镁隧道势垒(24)的结构中产生非常小的区域隧道结(30)。 掺有MgO隧道势垒的两个NbN电极导致改善的电流 - 电压特性,并可能导致更好的结噪声特性。 NbN电极优选溅射沉积,第一NbN电极沉积在保持在约250℃至500℃的绝缘衬底上,以改善电极的质量。