公开(公告)号：US09972474B2

公开(公告)日：2018-05-15

申请号：US15224628

申请日：2016-07-31

Applicant: FEI Company

Inventor： Cornelis van Beek ,  Frederick H. Schamber ,  N. William Parker

IPC: H01J37/00 ,  H01J37/244 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  G01N23/225 ,  H01J37/26

CPC classification number: H01J37/244 ,  G01N23/203 ,  G01N23/2252 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/164 ,  H01J2237/2442 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24578 ,  H01J2237/2807

Abstract: An electron microscope including a vacuum chamber for containing a specimen to be analyzed, an optics column, including an electron source and a final probe forming lens, for focusing electrons emitted from the electron source, a specimen stage positioned in the vacuum chamber under the probe forming lens for holding the specimen, and multiple x-ray detectors positioned within the vacuum chamber, at different takeoff angles with respect to the sample's x-ray emission position in the chamber. Takeoff angles are provided to improve the counting efficiency of the various sensors. Multiple detectors of different types may be supported within the vacuum chamber on a mechanical support system, which may be adjustable. A method includes operating the sensors to optimize the time required for accurate x-ray counting by gathering data at the multiple takeoff angles.

公开(公告)号：US20180120456A1

公开(公告)日：2018-05-03

申请号：US15854993

申请日：2017-12-27

Applicant: Horiba, Ltd.

Inventor： Kengo Yasui ,  Kazutaka Okamoto ,  Shuji Takada

IPC: G01T1/24 ,  H01J37/244

CPC classification number: G01T1/244 ,  H01J37/244 ,  H01J2237/2442

Abstract: A radiation detector includes a Peltier device (electronic cooling unit) for cooling a radiation detecting element, and a heat releasing part of the Peltier device is in thermal contact with a cold finger (thermally conductive part). The cold finger is made of a material with higher thermal conductivity than that of the base, and penetrates the base. The heat from the radiation detecting element is conducted from the heat releasing part of the Peltier device to the cold finger, and is dissipated to an area outside of the radiation detector through the cold finger. As such, heat is efficiently dissipated from the radiation detecting element.

公开(公告)号：US20170345616A1

公开(公告)日：2017-11-30

申请号：US15606784

申请日：2017-05-26

Applicant: EDAX, Incorporated

Inventor： Julio C. Liriano

IPC: H01J37/28 ,  G01T1/169 ,  G06F17/18 ,  H01J37/244

CPC classification number: H01J37/28 ,  G01N23/225 ,  G01T1/169 ,  G06F17/18 ,  H01J37/244 ,  H01J37/263 ,  H01J37/265 ,  H01J2237/2442 ,  H01J2237/2561 ,  H01J2237/2807 ,  H01J2237/2809

Abstract: A system for collection information from a sample includes a scan generator having a first communication channel and a second communication channel. The first communication channel provides data communication between the scan generator and one or more sampling location movement devices. The second communication channel provides data communication with one or more signal detectors.

公开(公告)号：US20170271120A1

公开(公告)日：2017-09-21

申请号：US15614941

申请日：2017-06-06

Applicant: THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC

Inventor： Alan RONEMUS

IPC: H01J37/09 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/09 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/2442

Abstract: A charged particle filter includes a magnetic deflector having a bore along an axis thereof passing through the magnetic deflector from a sample end to a detector end of the magnetic deflector, and through which bore charged particles pass when in use, the magnetic deflector being formed from two magnets positioned around the bore, with a gap between the two magnets, the two magnets each having a linear central section and two ends, each end forming a curved surface, the curved surface having an aspect ratio defined by a height in a range of between one tenth and ten times the gap between the two magnets, and a width in a range of between one tenth and ten times the gap.

公开(公告)号：US09697984B2

公开(公告)日：2017-07-04

申请号：US14925204

申请日：2015-10-28

Applicant: THERMO ELECTRON SCIENTIFIC INSTRUMENTS LLC

Inventor： Alan Ronemus

IPC: H01J37/09 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/09 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0213 ,  H01J2237/2442

Abstract: A charged particle filter includes a magnetic deflector having a bore along an axis thereof passing through the magnetic deflector from a sample end to a detector end of the magnetic deflector, and through which bore charged particles pass when in use, the magnetic deflector being formed from two magnets positioned around the bore, with a gap between the two magnets, the two magnets each having a linear central section and two ends, each end forming a curved surface, the curved surface having an aspect ratio defined by a height in a range of between one tenth and ten times the gap between the two magnets, and a width in a range of between one tenth and ten times the gap.

公开(公告)号：US20160313905A1

公开(公告)日：2016-10-27

申请号：US15137452

申请日：2016-04-25

Applicant: JEOL Ltd.

Inventor： Kazuhiro Tachibana ,  Hisashi Zaimoku ,  Akira Abe

IPC: G06F3/0484 ,  H01J37/22 ,  H01J37/244 ,  G06F3/0481 ,  G06F3/0488

CPC classification number: H01J37/22 ,  G06F3/04842 ,  G06F3/0488 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/2442

Abstract: A control device that controls a spectrometer includes: a specimen image display control section that performs a control process that displays a specimen image acquired by the spectrometer on a display section; and an spectrometer control section that performs a control process that causes the spectrometer to start analysis based on designation of an analysis position within the specimen image that has been performed by a pointing device, and performs a control process that causes the spectrometer to stop the analysis based on cancellation of the designation of the analysis position that has been performed by the pointing device.

Abstract translation: 控制光谱仪的控制装置包括：标本图像显示控制部，其执行将由所述光谱仪获取的样本图像显示在显示部上的控制处理; 以及光谱仪控制部，其进行基于由指示装置进行的样本图像内的分析位置的指定使光谱仪开始分析的控制处理，并进行导致光谱仪停止分析的控制处理 基于由指示装置执行的分析位置的指定的取消。

公开(公告)号：US09349572B2

公开(公告)日：2016-05-24

申请号：US14664423

申请日：2015-03-20

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku

IPC: H01J37/26 ,  H01J37/28

CPC classification number: H01J37/28 ,  G01N23/2252 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/424 ,  H01J2237/2442 ,  H01J2237/24585 ,  H01J2237/248 ,  H01J2237/28

Abstract: An energy dispersive X-ray analyzer is attached to a scanning electron microscope and includes: a SEM controller; a detector; an EDS controller; and a data processor. The data processor generates first and second X-ray mapping image respectively when the SEM controller controls the scanning electron microscope to irradiate the sample with an electron beam under first and second acceleration voltage conditions. The data processor corrects the first X-ray mapping image and the second X-ray mapping image into images that are independent of acceleration voltage condition based on a measurement intensity variation ratio of the X-ray when changed from the first acceleration voltage condition to the second acceleration voltage condition, and controls the display unit to display a difference image between the corrected first X-ray mapping image and the corrected second X-ray mapping image.

Abstract translation: 能量色散X射线分析仪附着在扫描电子显微镜上，包括：SEM控制器; 检测器 EDS控制器 和数据处理器。 当SEM控制器控制扫描电子显微镜以在第一和第二加速电压条件下用电子束照射样品时，数据处理器分别产生第一和第二X射线映射图像。 数据处理器将第一X射线映射图像和第二X射线映射图像基于X射线从第一加速电压条件变化到第二X射线映射图像的测量强度变化率而与加速电压条件无关的图像进行校正 第二加速电压条件，并且控制显示单元显示校正的第一X射线映射图像和校正的第二X射线映射图像之间的差分图像。

公开(公告)号：US08859985B2

公开(公告)日：2014-10-14

申请号：US14071155

申请日：2013-11-04

Applicant: HORIBA, Ltd.

Inventor： Kengo Yasui ,  Kazutaka Okamoto ,  Shuji Takada

IPC: G01T1/24 ,  H01J37/285 ,  H01J37/244 ,  G01N23/223

CPC classification number: G01T1/241 ,  G01N23/223 ,  G01N2223/076 ,  G01T1/244 ,  H01J37/244 ,  H01J37/285 ,  H01J2237/2442

Abstract: A radiation detector employed in a radiation detection apparatus and a fluorescent X-ray analyzer includes: a first circuit board on which a semiconductor radiation sensor is mounted and which is cooled by a Peltier device (an electronic cooling unit); and a second circuit board set apart from the first circuit board. A plurality of lead pins are joined to the second circuit board. Then, the first circuit board and the second circuit board are wire-bonded to each other. In comparison with conventional wire bonding performed onto the tips of lead pins, the work of connection is easy, the productivity is high, and the reliability of connection is high. Further, the second circuit board not requiring cooling is set apart so that cooling is concentrated on the first circuit board. This permits size reduction of the radiation detector.

Abstract translation: 用于放射线检测装置和荧光X射线分析仪的放射线检测器包括：安装了半导体辐射传感器并由珀耳帖装置（电子冷却单元）冷却的第一电路板; 以及与第一电路板分离的第二电路板。 多个引脚与第二电路板接合。 然后，第一电路板和第二电路板彼此线接合。 与在引脚的尖端执行的常规引线相比，连接工作容易，生产率高，连接可靠性高。 此外，不需要冷却的第二电路板被分开，使得冷却集中在第一电路板上。 这允许放射线检测器的尺寸减小。

公开(公告)号：US20140117231A1

公开(公告)日：2014-05-01

申请号：US13662072

申请日：2012-10-26

Applicant: FEI Company

Inventor： Michael James Owen ,  Michael Buhot

IPC: G01N23/225 ,  H01J37/256

CPC classification number: G01N23/2252 ,  G01N2223/418 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/2804 ,  H01J2237/2807

Abstract: The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows untrained operators to use it, as opposed to previous systems, which required extensive training and expertise.

Abstract translation: 本发明公开了两种现有的矿物分析方法的组合，并且使用了相似性度量发明，其允许以理论组成术语描述矿物定义，这意味着用户不需要找到每种矿物的实例，或调整规则 。 该系统允许未经训练的运营商使用它，而不是以前的系统，需要广泛的培训和专业知识。

公开(公告)号：US20140007307A1

公开(公告)日：2014-01-02

申请号：US13919656

申请日：2013-06-17

Applicant: FEI Company

Inventor： Brian Roberts Routh, JR. ,  Peter Christiaan Tiemeijer ,  Bart Jozef Janssen ,  Thomas G. Miller ,  David Foord ,  Ivan Lazic

IPC: G01Q10/04

CPC classification number: H01J37/28 ,  B82Y35/00 ,  G01Q10/04 ,  H01J37/26 ,  H01J37/295 ,  H01J37/3056 ,  H01J2237/2067 ,  H01J2237/208 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2611 ,  H01J2237/2614 ,  H01J2237/31749

Abstract: The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator.The method comprising comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.

Abstract translation: 本发明涉及使用装备有电子柱和离子束柱的粒子光学装置，相机系统，机械手来制备和成像样品的方法。 该方法包括以下步骤：从第一电子图像导出样本的第一ptychographic图像，使样本变薄，并形成样本的第二ptychographic图像。 在本发明的一个实施例中，用于第二图像的种子图像是第一个ptychografic图像。 在另一个实施例中，第二ptychographic图像是在稀化期间去除的层的图像。 在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。