公开(公告)号：US07751211B2

公开(公告)日：2010-07-06

申请号：US11717137

申请日：2007-03-13

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Ryuichi Takamura

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Ryuichi Takamura

IPC分类号： H02M7/217

CPC分类号： H02M7/125

摘要： An instantaneous voltage-drop compensation circuit including: a first voltage detector detecting three-phase voltages to be input to a power converter converting three-phase AC to DC based on control pulse signals, and outputting three-phase voltage signals; a first three-phase to two-phase converter converting the detected signals to two-phase voltage signals; a first current detector detecting three-phase currents to be input to the power converter and outputting three-phase current signals; a second three-phase to two-phase converter converting the detected current signals to two-phase current signals; a first subtracter generating a first deviation signal from input current command signals and the two-phase current signals; an input current controller generating input current control signals based on the first deviation signal; and a first adder adding the two-phase voltage signals to the input current control signals, to generate control pulse signals for the power converter.

摘要翻译： 一种瞬时电压补偿电路，包括：第一电压检测器，检测要输入到基于控制脉冲信号将三相AC转换为DC的功率转换器的三相电压，并输出三相电压信号; 将检测到的信号转换成两相电压信号的第一三相到两相转换器; 检测要输入到功率转换器并输出三相电流信号的三相电流的第一电流检测器; 将检测到的电流信号转换成二相电流信号的第二三相到两相转换器; 从输入电流指令信号和两相电流信号产生第一偏差信号的第一减法器; 输入电流控制器，基于所述第一偏差信号产生输入电流控制信号; 以及将两相电压信号与输入电流控制信号相加的第一加法器，以产生功率转换器的控制脉冲信号。

公开(公告)号：US20080130335A1

公开(公告)日：2008-06-05

申请号：US11717137

申请日：2007-03-13

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Ryuichi Takamura

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Ryuichi Takamura

IPC分类号： H02M7/00

CPC分类号： H02M7/125

摘要： An instantaneous voltage-drop compensation circuit including: a first voltage detector detecting three-phase voltages to be input to a power converter converting three-phase AC to DC based on control pulse signals, and outputting three-phase voltage signals; a first three-phase to two-phase converter converting the detected signals to two-phase voltage signals; a first current detector detecting three-phase currents to be input to the power converter and outputting three-phase current signals; a second three-phase to two-phase converter converting the detected current signals to two-phase current signals; a first subtracter generating a first deviation signal from input current command signals and the two-phase current signals; an input current controller generating input current control signals based on the first deviation signal; and a first adder adding the two-phase voltage signals to the input current control signals, to generate control pulse signals for the power converter.

摘要翻译： 一种瞬时电压补偿电路，包括：第一电压检测器，检测要输入到基于控制脉冲信号将三相AC转换为DC的功率转换器的三相电压，并输出三相电压信号; 将检测到的信号转换成两相电压信号的第一三相到两相转换器; 检测要输入到功率转换器并输出三相电流信号的三相电流的第一电流检测器; 将检测到的电流信号转换成二相电流信号的第二三相到两相转换器; 从输入电流指令信号和两相电流信号产生第一偏差信号的第一减法器; 输入电流控制器，基于所述第一偏差信号产生输入电流控制信号; 以及将两相电压信号与输入电流控制信号相加的第一加法器，以产生功率转换器的控制脉冲信号。

公开(公告)号：US20110134669A1

公开(公告)日：2011-06-09

申请号：US12958523

申请日：2010-12-02

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata

IPC分类号： H02M7/04

CPC分类号： H02M7/219 ,  H02M2001/0022

摘要： In compensating for unbalanced voltages of three-phase AC, instantaneous values of wye-phase voltages 120° out of phase with each other are obtained from line voltages using a centroid vector operation, symmetrical component voltages of three-phase balanced system are obtained from the instantaneous values of wye-phase voltages, a compensation signal to compensate unbalanced voltages of three-phase AC is generated from zero-phase-sequence voltage of symmetrical component voltages is generated, wye-phase voltages 120° out of phase, the unbalanced voltages of which are compensated, are obtained from the compensation signal and the symmetrical component voltages, a control signal of a PWM conversion is generated based on the compensated wye-phase voltage compensated, and the unbalanced voltages of three-phase AC are compensated. The amount of time to compensate the three-phase unbalanced voltages required for detecting an unbalance of voltages and generating a control signal can be shortened.

摘要翻译： 在补偿三相交流的不平衡电压时，使用质心向量运算从线电压获得相位相差120°的相位电压的瞬时值，三相平衡系统的对称分量电压从 产生相位电压的瞬时值，补偿信号补偿三相交流电压的不平衡电压，产生零相电压的对称分量电压，相位相位电压为120°相位，不平衡电压 由补偿信号和对称分量电压获得补偿后的PWM转换的控制信号，并根据经补偿的相位补偿的相位电压产生PWM转换的控制信号，并补偿三相AC的不平衡电压。 可以缩短补偿检测电压不平衡和产生控制信号所需的三相不平衡电压的时间量。

公开(公告)号：US08797003B2

公开(公告)日：2014-08-05

申请号：US13313475

申请日：2011-12-07

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata ,  Tsuyoshi Okano

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata ,  Tsuyoshi Okano

IPC分类号： G05F5/02 ,  H02M3/158 ,  H02M1/42

CPC分类号： H02M1/4208 ,  H02M3/1584 ,  Y02B70/126 ,  Y02P80/112

摘要： In power conversion according to the three-phase converter, symmetrical component voltage values of a balanced system are calculated from wye-phase voltages on the three-phase AC input side of the three-phase converter. On the DC output side thereof, the power factor is set, an average active power value is calculated from an output voltage value and an output current value, and an average reactive power is calculated from the set power factor. On the basis of the symmetrical component voltage values, the average active power, and the active reactive power, a compensation signal for compensating for unbalanced voltages of the three-phase AC voltages and a control signal for controlling the power factor are generated, and according to the compensation signal and the control signal, a control signal for outputting DC is generated.

摘要翻译： 在根据三相变换器的功率转换中，平衡系统的对称分量电压值由三相变换器的三相交流输入侧的相位电压计算。 在其直流输出侧，设定功率因数，根据输出电压值和输出电流值计算平均有功功率值，根据设定功率因数计算平均无功功率。 基于对称分量电压值，平均有功功率和有功无功功率，产生用于补偿三相AC电压的不平衡电压的补偿信号和用于控制功率因数的控制信号，并根据 对于补偿信号和控制信号，产生用于输出DC的控制信号。

公开(公告)号：US20120212191A1

公开(公告)日：2012-08-23

申请号：US13313475

申请日：2011-12-07

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata ,  Tsuyoshi Okano

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata ,  Tsuyoshi Okano

IPC分类号： G05F1/70

CPC分类号： H02M1/4208 ,  H02M3/1584 ,  Y02B70/126 ,  Y02P80/112

摘要： In power conversion according to the three-phase converter, symmetrical component voltage values of a balanced system are calculated from wye-phase voltages on the three-phase AC input side of the three-phase converter. On the DC output side thereof, the power factor is set, an average active power value is calculated from an output voltage value and an output current value, and an average reactive power is calculated from the set power factor. On the basis of the symmetrical component voltage values, the average active power, and the active reactive power, a compensation signal for compensating for unbalanced voltages of the three-phase AC voltages and a control signal for controlling the power factor are generated, and according to the compensation signal and the control signal, a control signal for outputting DC is generated.

摘要翻译： 在根据三相变换器的功率转换中，平衡系统的对称分量电压值由三相变换器的三相交流输入侧的相位电压计算。 在其直流输出侧，设定功率因数，根据输出电压值和输出电流值计算平均有功功率值，根据设定功率因数计算平均无功功率。 基于对称分量电压值，平均有功功率和有功无功功率，产生用于补偿三相AC电压的不平衡电压的补偿信号和用于控制功率因数的控制信号，并根据 对于补偿信号和控制信号，产生用于输出DC的控制信号。

公开(公告)号：US20100187998A1

公开(公告)日：2010-07-29

申请号：US12670265

申请日：2008-07-14

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi

IPC分类号： H05B31/02

CPC分类号： H05H1/46 ,  H01J37/32009 ,  H01J37/32935 ,  H01J37/3299 ,  H01J2237/0206

摘要： The present invention is directed to an apparatus for suppressing abnormal electrical discharge used for vacuum equipment which supplies power from a high-frequency power source to a plasma reaction chamber and executes a film formation process, provided with a power controller for controlling the high-frequency power source based on a deviation between a power command value and a power feedback value, and a cutoff controller for cutting off the power supply from the high-frequency power source to the plasma reaction chamber, based on a detection of the abnormal electrical discharge within the plasma reaction chamber. The cutoff controller exercises a first handling cutoff control and a second handling cutoff control, each having a different cutoff time. The first handling cutoff allows ions to remain in the plasma reaction chamber, and exercises the cutoff control over the high-frequency power source within a time duration which allows an arcing element to disappear. On the other hand, the second handling cutoff control exercises cutoff control over the high-frequency power source within a time range which allows abnormal arc ions to disappear. Accordingly, it is possible to supply power to plasma stably.

摘要翻译： 本发明涉及一种用于抑制从高频电源向等离子体反应室供电的真空设备的异常放电的装置，并且执行成膜处理，该装置设置有用于控制高频电源的高频 基于功率指令值和功率反馈值之间的偏差的电源，以及基于检测到高频电源对等离子体反应室的电源的切断控制器， 等离子体反应室。 截止控制器执行第一处理截止控制和第二处理截止控制，每个具有不同的截止时间。 第一处理截止允许离子保留在等离子体反应室中，并且在允许电弧元件消失的持续时间内对高频电源进行切断控制。 另一方面，第二处理截止控制在允许异常电弧离子消失的时间范围内对高频电源进行切断控制。 因此，可以稳定地向等离子体供给电力。

公开(公告)号：US08385096B2

公开(公告)日：2013-02-26

申请号：US12958523

申请日：2010-12-02

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi ,  Yoshihisa Hata

IPC分类号： H02M7/217

CPC分类号： H02M7/219 ,  H02M2001/0022

摘要： In compensating for unbalanced voltages of three-phase AC, instantaneous values of wye-phase voltages 120° out of phase with each other are obtained from line voltages using a centroid vector operation, symmetrical component voltages of three-phase balanced system are obtained from the instantaneous values of wye-phase voltages, a compensation signal to compensate unbalanced voltages of three-phase AC is generated from zero-phase-sequence voltage of symmetrical component voltages is generated, wye-phase voltages 120° out of phase, the unbalanced voltages of which are compensated, are obtained from the compensation signal and the symmetrical component voltages, a control signal of a PWM conversion is generated based on the compensated wye-phase voltage compensated, and the unbalanced voltages of three-phase AC are compensated. The amount of time to compensate the three-phase unbalanced voltages required for detecting an unbalance of voltages and generating a control signal can be shortened.

摘要翻译： 在补偿三相交流的不平衡电压时，使用质心向量运算从线电压获得相位相差120°的相位电压的瞬时值，三相平衡系统的对称分量电压从 产生相位电压的瞬时值，补偿信号补偿三相交流电压的不平衡电压，产生零相电压的对称分量电压，相位相位电压为120°相位，不平衡电压 由补偿信号和对称分量电压获得补偿后的PWM转换的控制信号，并根据经补偿的相位补偿的相位电压产生PWM转换的控制信号，并补偿三相AC的不平衡电压。 可以缩短补偿检测电压不平衡和产生控制信号所需的三相不平衡电压的时间量。

公开(公告)号：US08169162B2

公开(公告)日：2012-05-01

申请号：US12670265

申请日：2008-07-14

申请人： Itsuo Yuzurihara ,  Atsushi Takayanagi

发明人： Itsuo Yuzurihara ,  Atsushi Takayanagi

IPC分类号： H05B37/02

CPC分类号： H05H1/46 ,  H01J37/32009 ,  H01J37/32935 ,  H01J37/3299 ,  H01J2237/0206

摘要： The present invention is directed to an apparatus for suppressing abnormal electrical discharge used for vacuum equipment which supplies power from a high-frequency power source to a plasma reaction chamber and executes a film formation process, provided with a power controller for controlling the high-frequency power source based on a deviation between a power command value and a power feedback value, and a cutoff controller for cutting off the power supply from the high-frequency power source to the plasma reaction chamber, based on a detection of the abnormal electrical discharge within the plasma reaction chamber. The cutoff controller exercises a first handling cutoff control and a second handling cutoff control, each having a different cutoff time. The first handling cutoff allows ions to remain in the plasma reaction chamber, and exercises the cutoff control over the high-frequency power source within a time duration which allows an arcing element to disappear. On the other hand, the second handling cutoff control exercises cutoff control over the high-frequency power source within a time range which allows abnormal arc ions to disappear. Accordingly, it is possible to supply power to plasma stably.

摘要翻译： 本发明涉及一种用于抑制从高频电源向等离子体反应室供电的真空设备的异常放电的装置，并且执行成膜处理，该装置设置有用于控制高频电源的高频 基于功率指令值和功率反馈值之间的偏差的电源，以及基于检测到高频电源对等离子体反应室的电源的切断控制器， 等离子体反应室。 截止控制器执行第一处理截止控制和第二处理截止控制，每个具有不同的截止时间。 第一处理截止允许离子保留在等离子体反应室中，并且在允许电弧元件消失的持续时间内对高频电源进行切断控制。 另一方面，第二处理截止控制在允许异常电弧离子消失的时间范围内对高频电源进行切断控制。 因此，可以稳定地向等离子体供给电力。

公开(公告)号：US06211749B1

公开(公告)日：2001-04-03

申请号：US09310119

申请日：1999-05-12

申请人： Itsuo Yuzurihara ,  Satoru Matsukawa

发明人： Itsuo Yuzurihara ,  Satoru Matsukawa

IPC分类号： H03H740

CPC分类号： H03H7/38 ,  H04B3/56

摘要： An impedance matching device provided between a high-frequency generator and a load device matches an impedance of the high-frequency generator with an impedance of the load device and includes at least a coupled circuit which comprises a core, and a main winding and a control winding which are wound around the core. The coupled circuit changes an impedance of the impedance matching device by changing an inductance value of the main winding which depends on a magnitude of direct current flowing in the control winding.

摘要翻译： 设置在高频发生器和负载装置之间的阻抗匹配装置将高频发生器的阻抗与负载装置的阻抗相匹配，并且至少包括耦合电路，其包括芯，以及主绕组和控制 缠绕在芯上的绕组。 耦合电路通过改变主绕组的电感值来改变阻抗匹配装置的阻抗，该电感值取决于在控制绕组中流动的直流电流的大小。

公开(公告)号：US4605865A

公开(公告)日：1986-08-12

申请号：US624633

申请日：1984-06-26

申请人： Itsuo Yuzurihara

发明人： Itsuo Yuzurihara

IPC分类号： H03K17/04 ,  H02M3/335 ,  H03K17/0412 ,  H03K17/60 ,  H03K17/61 ,  H03K3/26

CPC分类号： H03K17/601 ,  H03K17/04126

摘要： An input drive apparatus of a power transistor is constituted by a transformer having a core with an air gap, a primary winding energized from an input source in accordance with a forward input bias instruction, and a secondary winding, a first transistor electrically insulated from the input source and turned ON by the voltage of the secondary winding for supplying a forward input bias to the power transistor, and a second transistor electrically insulated from the input source and turned ON in accordance with a reverse input bias instruction for supplying electromagnetic energy stored in the transformer to the input electrode of the power transistor to act as a reverse bias current in accordance with a reverse bias instruction. These is also provided diode means for returning to the input source the electromagnetic energy stored after charge carriers accumulated in the power transistor have been extinguished, and the electromagnetic energy stored in the transformer when a forward bias instruction is applied.

摘要翻译： 功率晶体管的输入驱动装置由具有气隙的磁芯的变压器，根据正向输入偏置指令从输入源通电的初级绕组和次级绕组构成，第一晶体管与 输入源并通过用于向功率晶体管提供正向输入偏置的次级绕组的电压接通，以及与输入源电绝缘的第二晶体管，并根据用于提供存储在电源中的电磁能的反向输入偏置指令而导通 变压器到功率晶体管的输入电极根据反向偏置指令充当反向偏置电流。 这些还提供二极管装置，用于在积累在功率晶体管中的电荷载流子已经熄灭之后返回到输入源，存储的电磁能量以及当施加正向偏压指令时存储在变压器中的电磁能量。