公开(公告)号：US07631555B2

公开(公告)日：2009-12-15

申请号：US10580112

申请日：2003-11-20

申请人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

发明人： Hiroshi Nakano ,  Masamichi Yamada ,  Masahiro Matsumoto ,  Izumi Watanabe ,  Keiji Hanzawa ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/6965 ,  G01F1/6845

摘要： A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter includes a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and a heating temperature control disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.

摘要翻译： 具有优异的温度特性和改进的测量精度的热空气流量计。 热空气流量计包括设置在空气流量计的壳体中的温度传感器，用于使用温度传感器校正来自测量元件的流量检测电压的计算单元，以及设置在温度控制电路中的加热温度控制，用于执行 加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。 可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差，并且可以实现具有优异的测量精度的热空气流量计。

公开(公告)号：US20060144138A1

公开(公告)日：2006-07-06

申请号：US10546174

申请日：2004-05-26

申请人： Masamichi Yamada ,  Izumi Watanabe ,  Keiichi Nakada ,  Junichi Horie

发明人： Masamichi Yamada ,  Izumi Watanabe ,  Keiichi Nakada ,  Junichi Horie

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/698

摘要： A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature ({Th=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.

摘要翻译： 一种以低成本制造并具有改进的可靠性的热流传感器。 在形成在半导体衬底（2）中的空腔（7）上，在腔的中心附近形成至少一个加热电阻（4），其中电绝缘膜置于加热电阻和空腔之间。 加热电阻（4）的温度（Th）通过恒温（{Th = Th-Ta））控制为高于介质温度（Ta）。 从加热电阻（4）的上游端到位于空腔上的电绝缘膜的上游端和恒温（DeltaTh）的气流方向的距离（Ws）满足以下关系： line-formula description =“In-line Formulas”end =“lead”？> DeltaTh / Ws <= 800（°C / mm）<？in-line-formula description =“In-line Formulas”end =“tail 因此，提供了能够防止由热诱导效应引起的诸如碳颗粒的漂浮微粒的沉积的热流量传感器，可以以低成本制造，并且具有高可靠性。

公开(公告)号：US06752014B1

公开(公告)日：2004-06-22

申请号：US09653168

申请日：2000-09-01

申请人： Atsushi Kanke ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe ,  Hisao Sonobe

发明人： Atsushi Kanke ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe ,  Hisao Sonobe

IPC分类号： G01F168

CPC分类号： G01F1/698 ,  G01F1/6845 ,  G01F1/696

摘要： A hot-wire type air flow meter for an internal combustion engine has an exothermic resistor film provided on a thin portion formed on a silicon substrate and a control circuit for controlling a voltage to be applied to the resistor film or a current to be supplied. The resistor film is arranged in a suction pipe of the internal combustion engine and heat is emitted to an air through the resistor film. In the case where a liquid droplet is deposited onto the resistor film, the control circuit controls the applied voltage to a value smaller than a voltage which is applied to the resistor film at the time of measuring a maximum specified measuring range or controls the supply current to a value smaller than a current flowing in the resistor film at the time of measuring the maximum specified measuring range.

摘要翻译： 用于内燃机的热线式空气流量计具有设置在形成在硅基板上的薄部分上的放热电阻膜和用于控制施加到电阻膜的电压或要供应的电流的控制电路。 电阻膜布置在内燃机的吸入管中，并且通过电阻膜将热量排放到空气中。 在液滴沉积到电阻膜上的情况下，控制电路将施加的电压控制为比测量最大规定测量范围时施加到电阻膜的电压小的值，或者控制电源电流 达到在测量最大规定测量范围时小于在电阻膜中流动的电流的值。

公开(公告)号：US07650784B2

公开(公告)日：2010-01-26

申请号：US12139761

申请日：2008-06-16

申请人： Izumi Watanabe ,  Junichi Horie ,  Keiichi Nakada ,  Kei Ueyama ,  Masamichi Yamada

发明人： Izumi Watanabe ,  Junichi Horie ,  Keiichi Nakada ,  Kei Ueyama ,  Masamichi Yamada

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/692 ,  G01F1/698 ,  G01F1/699

摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.

摘要翻译： 流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。 此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。 用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。 这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。 因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。 由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

公开(公告)号：US07337661B2

公开(公告)日：2008-03-04

申请号：US11352212

申请日：2006-02-13

申请人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

发明人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/692 ,  G01F1/698

摘要： A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two temperature-measuring resistors disposed downstream and upstream. The sensor element is positioned in the flow of a measured medium. It also includes an adjusting means for adjusting a excess temperature (ΔTh=Th−Ta) of the heat-generating resistor, which is the difference between the temperature (Ta) of the measured medium and the temperature (Th) of the heat-generating resistor. The adjusting means adjusts the excess temperature (ΔTh) of the heat-generating resistor depending on the temperature of the measured medium such that the excess temperature becomes smaller as the temperature of the measured medium increases.

摘要翻译： 一种低成本的热流量计，具有良好的温度特性和较小的变化。 热流量计包括传感器元件，其包括发热电阻器和设置在下游和上游的至少两个温度测量电阻器。 传感器元件位于测量介质的流动中。 还包括用于调节发热电阻器的过温度（DeltaTh = Th-Ta）的调节装置，其是测量介质的温度（Ta）与发热量的测量温度（Th）之差 电阻。 调节装置根据测量介质的温度来调节发热电阻器的过温度（DeltaTh），使得过量温度随着测量介质温度的升高而变小。

公开(公告)号：US20060272403A1

公开(公告)日：2006-12-07

申请号：US11505987

申请日：2006-08-18

申请人： Izumi Watanabe ,  Junichi Horie ,  Keiichi Nakada ,  Kei Ueyama ,  Masamichi Yamada

发明人： Izumi Watanabe ,  Junichi Horie ,  Keiichi Nakada ,  Kei Ueyama ,  Masamichi Yamada

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/6842 ,  G01F1/692 ,  G01F1/698 ,  G01F1/699

摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.

摘要翻译： 流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。 此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。 用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。 这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。 因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。 由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

公开(公告)号：US20060220662A1

公开(公告)日：2006-10-05

申请号：US11353937

申请日：2006-02-15

申请人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

发明人： Hiroshi Nakano ,  Masahiro Matsumoto ,  Masamichi Yamada ,  Keiichi Nakada ,  Izumi Watanabe

IPC分类号： G01R27/08

CPC分类号： G01C9/00 ,  G01F1/6845 ,  G01F1/69 ,  G01P15/008

摘要： A highly accurate physical quantity sensor which can ensure reliability in strength and reduce resistance changes caused by stresses. Assuming, with respect to stress σ imposed on a substrate in a predetermined direction (e.g., direction in which maximum stress is imposed), a parallel direction to be a horizontal direction and a perpendicular direction to be a vertical direction, each of resistors of the sensor has a horizontal resistance component Rl and a vertical resistance component Rt. When a ratio of a piezoresistance coefficient πl of the horizontal resistance component Rl, which is provided when the stress imposed on the substrate is applied to the horizontal resistance component Rl, to a piezoresistance coefficient πt of the vertical resistance component Rt, which is provided when the stress is applied to the vertical resistance component Rt, is πl:πt=−n:1 (n:integer), a resistance value ratio of the vertical resistance component Rt to the horizontal resistance component Rl is set substantially equal to the ratio of the piezoresistance coefficient πl to πt.

公开(公告)号：US20060207320A1

公开(公告)日：2006-09-21

申请号：US11352212

申请日：2006-02-13

申请人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

发明人： Masamichi Yamada ,  Masahiro Matsumoto ,  Hiroshi Nakano ,  Izumi Watanabe ,  Keiichi Nakada

IPC分类号： G01F1/68

CPC分类号： G01F1/692 ,  G01F1/698

摘要： A low-cost thermal flow meter that has good temperature characteristics and little variations. The thermal flow meter includes a sensor element including a heat-generating resistor and at least two temperature-measuring resistors disposed downstream and upstream. The sensor element is positioned in the flow of a measured medium. It also includes an adjusting means for adjusting a excess temperature (ΔTh=Th−Ta) of the heat-generating resistor, which is the difference between the temperature (Ta) of the measured medium and the temperature (Th) of the heat-generating resistor. The adjusting means adjusts the excess temperature (ΔTh) of the heat-generating resistor depending on the temperature of the measured medium such that the excess temperature becomes smaller as the temperature of the measured medium increases.

摘要翻译： 一种低成本的热流量计，具有良好的温度特性和较小的变化。 热流量计包括传感器元件，其包括发热电阻器和设置在下游和上游的至少两个温度测量电阻器。 传感器元件位于测量介质的流动中。 它还包括调节装置，用于调节发热电阻器的过热温度（DeltaTh = Th-Ta），该温度是测量介质的温度（Ta）与发热量之间的温度（Th）之差 电阻。 调节装置根据测量介质的温度来调节发热电阻器的过温度（DeltaTh），使得过量温度随着测量介质温度的升高而变小。

公开(公告)号：US07032446B2

公开(公告)日：2006-04-25

申请号：US10083403

申请日：2002-02-27

申请人： Keiichi Nakada ,  Izumi Watanabe ,  Junichi Horie ,  Kei Ueyama ,  Hiromu Kikawa ,  Masamichi Yamada

发明人： Keiichi Nakada ,  Izumi Watanabe ,  Junichi Horie ,  Kei Ueyama ,  Hiromu Kikawa ,  Masamichi Yamada

IPC分类号： G01F1/68

CPC分类号： G01F1/684 ,  G01F1/6842 ,  G01F5/00 ,  G01F15/12

摘要： There is provided a flow rate measuring device which comprises a means for introducing a backward flow of the main passage into the sub-passage through the outlet of the sub-passage of the flow rate measuring device is provided near the outlet of the sub-passage, in order to keep the flow rate measuring element from being destroyed under the presence of dust and water in an intake manifold and which has high reliability for a long period of use and an excellent pulsation characteristic.

摘要翻译： 提供了一种流量测量装置，其包括用于将主通道的逆流引导到通过流量测量装置的子通道的出口的子通道的装置，设置在子通道的出口附近 为了保持流量测量元件在进气歧管中存在灰尘和水的情况下被破坏，并且长时间使用具有高可靠性和优异的脉动特性。

公开(公告)号：US06988399B1

公开(公告)日：2006-01-24

申请号：US09763970

申请日：2000-05-02

申请人： Izumi Watanabe ,  Keiichi Nakada ,  Masamichi Yamada

发明人： Izumi Watanabe ,  Keiichi Nakada ,  Masamichi Yamada

IPC分类号： G01F1/68

CPC分类号： G01P15/123 ,  F02D41/1454 ,  F02D41/182 ,  F02D41/187 ,  F02D2200/0414 ,  F02D2200/703 ,  G01F1/6845 ,  G01F1/692 ,  G01P2015/0828 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

摘要： It is an object of the present invention to provide a simple-structure physical quantity detecting device whose resistance does not vary irrespective of use for long periods, a method for manufacturing thereof and a motor vehicle control system using the physical quantity detecting sensor to improve its reliability. An airflow sensor (20) is equipped with a heat generating resistor (12H) and a temperature measuring resistor (12C), formed on a semiconductor substrate (11). The heat generating resistor (12H) is formed in a thin-wall portion (11A). Both end portions of the heat generating resistor (12H) are connected through first lead conductors (13H1, 13H2) to electrodes (14H1, 14H2), respectively. A second lead conductor (15H1) connected to the electrode (14H1) extends to an outer circumferential portion of the airflow sensor (10). A second lead conductor (15H2, 15H3) connected to the electrode (14H2) also extend to the outer circumferential portion of the airflow sensor (10), but a disconnection portion (16) is made in the middle thereof to establish electrical non-conduction.

摘要翻译： 本发明的一个目的是提供一种简单结构的物理量检测装置，其电阻不会随着长时间的使用而变化，其制造方法和使用该物理量检测传感器的机动车辆控制系统来改善其 可靠性。 气流传感器（20）配备有形成在半导体衬底（11）上的发热电阻器（12H）和温度测量电阻器（12C）。 发热电阻器（12H）形成在薄壁​​部分（11A）中。 发热电阻器（12H）的两端分别通过第一引线导体（13H 1，13 H 2）连接到电极（14H 1，14 H 2）。 连接到电极（14H 1）的第二引线导体（15H 1）延伸到气流传感器（10）的外周部分。 连接到电极（14H 2）的第二引线导体（15H 2，15 H 3）也延伸到气流传感器（10）的外周部分，但是在其中间形成有断开部分（16） 建立电气非导通。