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公开(公告)号：US11675208B1
公开(公告)日：2023-06-13
申请号：US17300091
申请日：2021-03-05
Applicant: J.A. WOOLLAM CO., INC
Inventor： Stefan Schoeche , Martin M. Liphardt , Ping He , Jeremy A Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , John A Woollam , James D. Welch
CPC classification number: G02B27/48 , G01B9/02084 , G01B11/24
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.
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公开(公告)号：US10061068B1
公开(公告)日：2018-08-28
申请号：US15530779
申请日：2017-02-27
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Craig M. Herzinger , Ping He , Jeffrey S. Hale
CPC classification number: G02B27/286 , G02B5/04 , G02B5/3083 , G02B17/006
Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.
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公开(公告)号：US09851294B1
公开(公告)日：2017-12-26
申请号：US14545816
申请日：2015-06-24
Inventor： Tino Hofmann , Mathias M. Schubert , Stefan Schoeche , Sean Knight , Craig M. Herzinger , John A. Woollam , Greg K. Pribil , Thomas E. Tiwald
IPC: G01N21/3586 , G01N21/21 , G01N27/72 , G01J4/04
CPC classification number: G01N21/211 , G01J4/04 , G01N21/3586 , G01N27/72 , G01N2021/213
Abstract: System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
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公开(公告)号：US20220244169A1
公开(公告)日：2022-08-04
申请号：US17300660
申请日：2021-09-16
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Ping He , Martin M. Liphardt , Jeremy A. Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , Stefan Schoeche , James D. Welch
Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
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公开(公告)号：US10989601B1
公开(公告)日：2021-04-27
申请号：US16873540
申请日：2020-05-01
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer , Craig M. Herzinger
Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
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Patent Agency Ranking
公开(公告)号：US09976902B1
公开(公告)日：2018-05-22
申请号：US15731298
申请日：2017-05-22
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Stefan Schoeche , Jeremy A. Van Derslice , Jeffrey S. Hale , Craig M. Herzinger
IPC: G01J4/00 , G01J3/447 , G06F17/17 , G01J4/04 , G01N21/21 , G06G7/30 , G03F7/004 , G06F17/12 , G06F17/18 , G06K15/22
CPC classification number: G01J3/447 , G01J4/04 , G01N21/211 , G01N2021/213 , G03F7/0042 , G06F17/12 , G06F17/17 , G06F17/175 , G06F17/18 , G06G7/30 , G06K15/225
Abstract: Methodology of characterizing pore size and distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on a Bruggerman effective medium.
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公开(公告)号：US09121757B2
公开(公告)日：2015-09-01
申请号：US14120194
申请日：2014-05-05
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Craig M. Herzinger
CPC classification number: G01J4/04 , G01J5/20 , G01J5/42 , G01N21/211 , G01N21/3581 , G01N2021/3595
Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).
Abstract translation: 太赫兹椭偏仪，基本的优选实施例是具有反向波振荡器（BWO）的顺序系统; 包括线栅（WGP1）的第一可旋转偏振器; 包括线栅（RWGP）的旋转偏振器; 用于支撑样品（S）的阶段（STG）; 包括第一（RP），第二（RM1），第三（RM2）和第四（RM3）元件的旋转延迟器（RRET） 包括线栅（WGP2）的第二可旋转偏振器; 和Golay细胞检测器（DET）。
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公开(公告)号：US10914866B1
公开(公告)日：2021-02-09
申请号：US16038004
申请日：2018-07-17
Inventor： Tino Hofmann , Daniel Fullager , Stefan Schoeche , Craig M. Herzinger , Susanne Madeline Lee , Erin Kathleen Sharma
Abstract: Materials comprising metamaterials exhibiting form-induced birefringence and anisotropic optical properties are provided. The disclosed articles comprise structures with critical dimensions which are on the order of or smaller than the wavelength for the gigahertz and terahertz spectral range. Methods of preparing same using stereolithography are disclosed. In a further aspect, the disclosed methods pertain to spectroscopic ellipsometry methods comprising a biaxial (orthorhombic) layer homogenization approach is to analyze the terahertz ellipsometric data obtained at three different sample azimuth orientations. The disclosed articles and methods demonstrate provide an avenue to fabricate metamaterials for the terahertz spectral range and allows tailoring of the polarizability and anisotropy of the host material. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present invention.
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公开(公告)号：US10606093B1
公开(公告)日：2020-03-31
申请号：US15932578
申请日：2018-03-16
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Craig M. Herzinger
Abstract: A retarder that comprises at least two plates, each of which comprise two surfaces that are parallel to, or substantially parallel to one another, said plates being tipped with respect to one another so that the surfaces of one thereof are not parallel to the surfaces of the other, each said plate further comprising a biased fast axis that is neither parallel to, or perpendicular to surfaces of said plates.
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公开(公告)号：US10175160B1
公开(公告)日：2019-01-08
申请号：US15932748
申请日：2018-04-20
Applicant: J.A. Woollam Co., Inc.
Inventor： Stefan Schoeche , Jeremy A. Van Derslice , Jeffrey S. Hale , Craig M. Herzinger
Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
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