公开(公告)号：US20040113075A1

公开(公告)日：2004-06-17

申请号：US10678956

申请日：2003-10-03

Applicant: JEOL LTD.

Inventor： Mikio Naruse

IPC: H01J037/22 ,  H01J037/26

CPC classification number: H01J37/244 ,  H01J37/222 ,  H01J37/224 ,  H01J37/26 ,  H01J2237/221 ,  H01J2237/2446

Abstract: A transmission electron microscope capable of obtaining a high-resolution, wide field-of-view TEM image corresponding to the spatial resolution of the existing transmission electron microscope is accomplished using CCD TV cameras. The microscope includes four CCD cameras, for example, having their fiber tubes tilted. The first fiber tube is tilted from a point A toward a point B. The second fiber tube is tilted from the point A toward a point E. The third fiber tube is tilted from the point A toward a point D. The fourth fiber tube is tilted from the point A toward a point C. CCD mounts are prevented from interfering with each other by tilting the fiber tubes in this way.

Abstract translation: 能够获得与现有透射电子显微镜的空间分辨率相对应的高分辨率，宽视野TEM图像的透射电子显微镜是使用CCD电视摄像机实现的。 显微镜包括四个CCD摄像机，例如，其光纤管倾斜。 第一纤维管从点A向点B倾斜。第二纤维管从点A向点E倾斜。第三纤维管从点A向点D倾斜。第四纤维管是 从点A向点C倾斜。通过以这种方式倾斜光纤管，防止CCD安装座相互干扰。