公开(公告)号：US20030085355A1

公开(公告)日：2003-05-08

申请号：US10329409

申请日：2002-12-27

Applicant: NIKON CORPORATION

Inventor： Yoshiaki Kohama

IPC: H01J037/26

CPC classification number: H01J37/045 ,  G01N23/2251 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/0203 ,  H01J2237/1504 ,  H01J2237/151 ,  H01J2237/221 ,  H01J2237/2817

Abstract: An electron beam apparatus prevents a rapid increase of dosage caused by stoppage or deceleration of movement and protects the specimen when the specimen is irradiated with the electron beam while the specimen and the electron beam are being relatively moved. An electron beam source outputs the electron beam. The dosage of electron beam irradiated per unit area of the specimen is measured. A storage section stores a predetermined dosage per unit area in memory for the specimen. A detector detects over exposure of the electron beam when the measured dosage per unit area is greater than the dosage per unit area stored in the storage section. A controller controls the electron beam source to reduce the dosage per unit area of the electron beam lower than the dosage per unit area stored in the storage section.

Abstract translation: 电子束装置防止运动停止或减速引起的剂量快速增加，并且当样本和电子束相对移动时，在用电子束照射样本时保护样本。 电子束源输出电子束。 测量每单位面积照射的电子束的剂量。 存储部分将每单位面积的预定剂量存储在样品的存储器中。 当每单位面积的测量剂量大于存储部分中存储的每单位面积的剂量时，检测器检测电子束的过度曝光。 控制器控制电子束源以减少电子束单位面积的剂量低于存储部分中存储的每单位面积的剂量。

公开(公告)号：US20040188613A1

公开(公告)日：2004-09-30

申请号：US10807116

申请日：2004-03-24

Applicant: Hitachi High-Technologies Corporation

Inventor： Kazutoshi Kaji ,  Yoshifumi Taniguchi ,  Shigeto Isakozawa

IPC: H01J037/26 ,  H01J037/05

CPC classification number: H01J37/1471 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/2802

Abstract: A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic prism to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic prism, and a control unit for controlling the exciting conditions of the deflection coils.

Abstract translation: 扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。 该电子显微镜还包括设置在磁性棱镜的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量过滤器，偏转线圈用于校正 由磁性棱镜形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。

公开(公告)号：US20040075053A1

公开(公告)日：2004-04-22

申请号：US10634810

申请日：2003-08-06

Applicant: LEO Elektronenmikroskopie GmbH

Inventor： Dirk Preikszas ,  Michael Steigerwald

IPC: H01J037/26 ,  H01J037/147

CPC classification number: H01J37/153 ,  H01J37/147 ,  H01J2237/1523 ,  H01J2237/28 ,  H01J2237/3175

Abstract: There are disclosed particle-optical beam splitters providing at least three beam-manipulating regions having magnetic fields of different field strengths provided therein for at least one particle beam passing the beam splitter. The beam splitter is, in first order, free of dispersion, astigmatism and distortion.

Abstract translation: 公开了提供至少三个光束操纵区域的粒子光束分离器，其中为其中通过分束器的至少一个粒子束提供了具有不同场强的磁场。 分束器的第一级没有色散，散光和失真。

公开(公告)号：US20030066961A1

公开(公告)日：2003-04-10

申请号：US10185729

申请日：2002-07-01

Applicant: Carl Zeiss Semiconductor Mfg. Technologies AG

Inventor： Oliver Kienzle ,  Dirk Stenkamp ,  Michael Steingerwald ,  Rainer Knippelmeyer

IPC: H01J037/26

CPC classification number: H01J37/28 ,  H01J2237/082 ,  H01J2237/2446

Abstract: An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.

Abstract translation: 一种用于对物体平面中定位的物体进行成像的检查系统，包括用于向物体的界定场提供能量的照明装置，使得带电粒子从场的位置出现，该场可在物体的平面中移动， 第一偏转器，用于提供可变偏转场，用于引导通过固定的预定光束横截面从物体的可选择区域的位置出射的带电粒子，以及设置在光束路径中的位置敏感检测器，使得带电粒子在 已经穿过第一偏转器，撞击位置敏感检测器，其中从该区域的不同位置出现的颗粒被成像在位置敏感检测器的分配到出现位置的不同位置上。

公开(公告)号：US20020153484A1

公开(公告)日：2002-10-24

申请号：US10056218

申请日：2002-01-24

Applicant: JEOL Ltd.

Inventor： Toshikatsu Kaneyama

IPC: H01J037/26

CPC classification number: H01J37/26 ,  H01J37/05

Abstract: A transmission electron microscope (TEM) equipped with an energy filter which functions, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., objective lens system, four intermediate lens systems, and projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.

Abstract translation: 具有功能的能量过滤器的透射电子显微镜（TEM），显微镜的特征在于防止了所产生的图像或衍射图案的旋转。 显微镜具有6个透镜系统，即物镜系统，四个中间透镜系统和投影透镜系统。 如果操作模式改变，则包括物镜系统，四个中间透镜系统和投影透镜系统的各种透镜系统的透镜的线圈的线圈数的乘积的总和， 并且它们各自的激励电流保持恒定。

公开(公告)号：US20020148960A1

公开(公告)日：2002-10-17

申请号：US10174053

申请日：2002-06-19

Applicant: Hitachi, Ltd.

Inventor： Hideo Todokoro ,  Sho Takami ,  Makoto Ezumi

IPC: H01J037/26

CPC classification number: H01J37/28 ,  H01J2237/047

Abstract: A scanning electron microscope using the retarding method and the boosting method includes a sample holder for holding a sample on the sample holder; a shield electrode arranged between an object lens and the sample, in which an aperture for passing said primary electron beam is formed; a negative-voltage applying circuit for applying a negative voltage to the sample holder and the shield electrode; an acceleration tube located in an electron-beam passing hole in the object lens, provided to pass a primary electron beam, for further accelerating the primary electron beam; and a control electrode located between the acceleration tube and the sample, in which an aperture whose size is smaller than the aperture formed in said shield electrode is provided to pass the primary electron beam, a positive voltage in the positive direction to the negative voltage being applied to the control electrode, superimposed on the negative voltage.

Abstract translation: 使用延迟方法和升压方法的扫描电子显微镜包括：样品保持器，用于将样品保持在样品保持器上; 设置在物镜和样品之间的屏蔽电极，其中形成有用于通过所述一次电子束的孔; 负电压施加电路，用于向所述样品保持器和所述屏蔽电极施加负电压; 位于物镜中的电子束通过孔中的加速管，设置成使一次电子束通过，用于进一步加速一次电子束; 以及设置在加速管与样品之间的控制电极，其中尺寸小于形成在所述屏蔽电极中的孔径的孔设置成使一次电子束通过，正电压正负电压为负电压 施加到控制电极上，叠加在负电压上。

公开(公告)号：US20040183017A1

公开(公告)日：2004-09-23

申请号：US10751987

申请日：2004-01-07

Inventor： Chisato Kamiya ,  Masahiro Akatsu ,  Mitsugu Sato

IPC: H01J037/26

CPC classification number: H01J37/28 ,  H01J37/244

Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.

Abstract translation: 这里公开了具有透镜式物镜的高分辨率扫描电子显微镜。 显微镜被构造成检测以广角散射的透射电子，以根据每个样品和目的观察高对比度STEM图像。 暗场检测器靠近物镜磁极设置。 显微镜具有用于沿着光轴移动暗视场检测器的装置，以便控制每个检测到的暗场信号的散射角。

公开(公告)号：US20040113075A1

公开(公告)日：2004-06-17

申请号：US10678956

申请日：2003-10-03

Applicant: JEOL LTD.

Inventor： Mikio Naruse

IPC: H01J037/22 ,  H01J037/26

CPC classification number: H01J37/244 ,  H01J37/222 ,  H01J37/224 ,  H01J37/26 ,  H01J2237/221 ,  H01J2237/2446

Abstract: A transmission electron microscope capable of obtaining a high-resolution, wide field-of-view TEM image corresponding to the spatial resolution of the existing transmission electron microscope is accomplished using CCD TV cameras. The microscope includes four CCD cameras, for example, having their fiber tubes tilted. The first fiber tube is tilted from a point A toward a point B. The second fiber tube is tilted from the point A toward a point E. The third fiber tube is tilted from the point A toward a point D. The fourth fiber tube is tilted from the point A toward a point C. CCD mounts are prevented from interfering with each other by tilting the fiber tubes in this way.

Abstract translation: 能够获得与现有透射电子显微镜的空间分辨率相对应的高分辨率，宽视野TEM图像的透射电子显微镜是使用CCD电视摄像机实现的。 显微镜包括四个CCD摄像机，例如，其光纤管倾斜。 第一纤维管从点A向点B倾斜。第二纤维管从点A向点E倾斜。第三纤维管从点A向点D倾斜。第四纤维管是 从点A向点C倾斜。通过以这种方式倾斜光纤管，防止CCD安装座相互干扰。

公开(公告)号：US20030116710A1

公开(公告)日：2003-06-26

申请号：US10203475

申请日：2002-12-02

Inventor： Hakan Olin

IPC: H01J037/26

CPC classification number: G01Q30/02 ,  H01J37/26 ,  Y10S977/852

Abstract: This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.

Abstract translation: 本发明涉及一种用于增加透射电子显微镜可获得的测量信息的方法，所述信息涉及测量样品，包括以下步骤：在所述透射电子显微镜中包括原子力显微镜装置。 本发明还涉及一种透射电子显微镜装置，其特征在于，将透射电子显微镜与位于所述透射电子显微镜内的原子力显微镜组合。 最后，本发明涉及用于插入透射电子显微镜的装置，其特征在于，所述装置包括原子力显微镜装置。

公开(公告)号：US20030025075A1

公开(公告)日：2003-02-06

申请号：US09920492

申请日：2001-08-01

Applicant: THE UNIVERSITY OF CHICAGO

Inventor： Nestor J. Zaluzec

IPC: H01J037/26 ,  G01N023/04

CPC classification number: H01J37/28 ,  G01N23/04

Abstract: A scanning confocal microscope and methods are provided for configuring scanning confocal microscopes for imaging specimens, such as, high resolution imaging of thick non-optically transparent specimens including imaging of buried or subsurface features of thick non-optically transparent structures. The scanning confocal microscope, such as a scanning confocal electron microscope (SCEM), is configured to image structures buried in thick specimens, such as specimens greater than eight microns thick, utilizing confocal imaging principles. A scanning confocal microscope includes an illumination source, a specimen, and a detector. The illumination source provides a focused radiation beam that is applied to the specimen. The detector detects an interaction signal from the specimen. The scanning confocal microscope is configured to operate in the confocal imaging mode, where the imaging source, specimen and detector are arranged to be located at conjugate image points. The focused radiation beam provided by the illumination source includes an electron beam, a proton beam, an ion beam, or an x-ray beam. The focused radiation beam provided by the illumination source is capable of penetrating thick non-optically transparent specimens, unlike visible light or optical probes that cannot penetrate significant depths in optically dense specimens. The incident probe is sequentially scanned across a region of interest of the specimen and the net integrated confocal intensity at each point is detected and used to provide an image display. A scanning confocal electron microscope (SCEM) is provided that permits resolutions better than 100 nanometers for materials as thick as 8-10 microns. The image resolution provided is equal to or better than typical high flux x-ray sources, while operating at speeds up to one hundred times faster and the scanning confocal microscope can be located in a conventional laboratory space.