公开(公告)号：US20240096588A1

公开(公告)日：2024-03-21

申请号：US18368310

申请日：2023-09-14

Applicant: JEOL Ltd.

Inventor： Kanako Noguchi

IPC: H01J37/22

CPC classification number: H01J37/228 ,  H01J37/224 ,  H01J2237/2802

Abstract: A laser beam illumination equipment has a laser beam generation section and a mirror unit. An image generation section has a camera and a camera controller. A laser beam illumination control section sets a pulse period of a laser beam to the same period as an exposure period of the camera. With this configuration, a state change of a specimen can be set uniform over exposure durations. A pulse train of the laser beam may be generated based on a synchronization signal which is output from the camera controller.

公开(公告)号：US20230290607A1

公开(公告)日：2023-09-14

申请号：US18120617

申请日：2023-03-13

Applicant: JEOL Ltd.

Inventor： Takeo Sasaki ,  Kanako Noguchi ,  Kazuki Yagi

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J37/265

Abstract: A charged particle beam apparatus for scanning a specimen with a charged particle beam and acquiring a scan image. The charged particle beam apparatus including: an optical system that includes a pulse mechanism for illuminating the specimen with pulses of the charged particle beam, and a deflector that deflects the charged particle beam and scans the specimen with the deflected charged particle beam; and a control unit that controls the optical system. The control unit controls the optical system so as to satisfy T = n × t (n is a natural number). T represents a dwell time of the charged particle beam in each pixel of the scan image, and t represents a cycle of pulses of the charged particle beam.