公开(公告)号：US11467106B2

公开(公告)日：2022-10-11

申请号：US16885916

申请日：2020-05-28

Applicant: JEOL Ltd.

Inventor： Kazunori Tsukamoto ,  Masahiro Asai ,  Shigeru Honda

IPC: G01N23/207 ,  G01N23/2209 ,  G01N23/2252

Abstract: An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.

公开(公告)号：US20200378909A1

公开(公告)日：2020-12-03

申请号：US16885916

申请日：2020-05-28

Applicant: JEOL Ltd.

Inventor： Kazunori Tsukamoto ,  Masahiro Asai ,  Shigeru Honda

IPC: G01N23/2209 ,  G01K13/00 ,  G01N23/2252

Abstract: An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.