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公开(公告)号:US20240021405A1
公开(公告)日:2024-01-18
申请号:US18222068
申请日:2023-07-14
Applicant: JEOL Ltd.
Inventor: Yoshikazu Sasaki , Tomohisa Fukuda , Tomohiro Mihira , Norimasa Sakuta , Misumi Kadoi , Tatsuhito Kimura
IPC: H01J37/20
CPC classification number: H01J37/20
Abstract: A holder includes a first sub holder configured to hold a primary specimen, and a second sub holder configured to hold a support member. The primary specimen is processed in a first state where the holder is disposed within a first specimen processing apparatus. Subsequently, in a second state where the holder is disposed within a second specimen processing apparatus, a secondary specimen is prepared from the primary specimen, the secondary specimen is moved onto the support member, and a thin film specimen is prepared from the secondary specimen.
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公开(公告)号:US20230238208A1
公开(公告)日:2023-07-27
申请号:US18101182
申请日:2023-01-25
Applicant: JEOL Ltd.
Inventor: Norimasa Sakuta , Tomohisa Fukuda , Osamu Suzuki , Masateru Shibata
IPC: H01J37/20
CPC classification number: H01J37/20 , H01J2237/31749 , H01J37/28
Abstract: A sample cartridge has a sample stand and an inclining mechanism. A sample cartridge holding apparatus has a housing part which is inclined. When the sample cartridge is inserted into the housing part, a contact portion contacts a lever of the inclining mechanism, and the sample stand is inclined by a predetermined angle. With this process, an appropriate inclination angle is realized for the sample stand.
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