Specimen Processing Holder and Specimen Processing Method

    公开(公告)号:US20240021405A1

    公开(公告)日:2024-01-18

    申请号:US18222068

    申请日:2023-07-14

    Applicant: JEOL Ltd.

    CPC classification number: H01J37/20

    Abstract: A holder includes a first sub holder configured to hold a primary specimen, and a second sub holder configured to hold a support member. The primary specimen is processed in a first state where the holder is disposed within a first specimen processing apparatus. Subsequently, in a second state where the holder is disposed within a second specimen processing apparatus, a secondary specimen is prepared from the primary specimen, the secondary specimen is moved onto the support member, and a thin film specimen is prepared from the secondary specimen.

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