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    Specimen Machining Device and Specimen Machining Method
    2.
    发明申请
    Specimen Machining Device and Specimen Machining Method 有权

    公开(公告)号：US20220392739A1

    公开(公告)日：2022-12-08

    申请号：US17832054

    申请日：2022-06-03

    Applicant: JEOL Ltd.

    Inventor： Munehiro Kozuka ,  Tsutomu Negishi ,  Tatsuhito Kimura ,  Yoshikazu Ishikawa ,  Hisashi Kawahara

    IPC: H01J37/22 ,  H01J37/08 ,  H01J37/09 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305 ,  H01L21/66

    Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera. The processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.

    Specimen Processing Holder and Specimen Processing Method
    3.
    发明公开
    Specimen Processing Holder and Specimen Processing Method 审中-公开

    公开(公告)号：US20240021405A1

    公开(公告)日：2024-01-18

    申请号：US18222068

    申请日：2023-07-14

    Applicant: JEOL Ltd.

    Inventor： Yoshikazu Sasaki ,  Tomohisa Fukuda ,  Tomohiro Mihira ,  Norimasa Sakuta ,  Misumi Kadoi ,  Tatsuhito Kimura

    IPC: H01J37/20

    CPC classification number: H01J37/20

    Abstract: A holder includes a first sub holder configured to hold a primary specimen, and a second sub holder configured to hold a support member. The primary specimen is processed in a first state where the holder is disposed within a first specimen processing apparatus. Subsequently, in a second state where the holder is disposed within a second specimen processing apparatus, a secondary specimen is prepared from the primary specimen, the secondary specimen is moved onto the support member, and a thin film specimen is prepared from the secondary specimen.

    Specimen Machining Device and Information Provision Method
    4.
    发明申请
    Specimen Machining Device and Information Provision Method 有权

    公开(公告)号：US20220392744A1

    公开(公告)日：2022-12-08

    申请号：US17832001

    申请日：2022-06-03

    Applicant: JEOL Ltd.

    Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Tsutomu Negishi ,  Hisashi Kawahara

    IPC: H01J37/304 ,  H01J37/08 ,  H01J37/20 ,  H01J37/22

    Abstract: A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, an information provision unit for providing information indicating an expected machining completion time, and a storage unit for storing past machining information. The information provision unit performs processing for calculating the expected machining completion time based on the past machining information, processing for acquiring an image photographed by the camera, processing for calculating a machining speed based on the acquired image, and processing for updating the expected machining completion time based on the machining speed.

    Ion Beam Processing Apparatus and Method for Controlling Operation Thereof
    6.
    发明申请
    Ion Beam Processing Apparatus and Method for Controlling Operation Thereof 有权

    公开(公告)号：US20220238310A1

    公开(公告)日：2022-07-28

    申请号：US17583464

    申请日：2022-01-25

    Applicant: JEOL Ltd.

    Inventor： Tatsuhito Kimura ,  Munehiro Kozuka

    IPC: H01J37/32

    Abstract: At timing t0, a brake gas (raw material gas) starts to be supplied to an ion beam generator, and the brake gas is fed into a turbo molecular pump. After timing t1, a vent valve is opened intermittently to feed atmospheric air into the turbo molecular pump. The brake gas may be different from the raw material gas. The brake gas is supplied using a gas supply system.

    Sample Milling Apparatus, Shield Plate, and Sample Milling Method
    8.
    发明公开
    Sample Milling Apparatus, Shield Plate, and Sample Milling Method 审中-公开

    公开(公告)号：US20240096584A1

    公开(公告)日：2024-03-21

    申请号：US18368789

    申请日：2023-09-15

    Applicant: JEOL Ltd.

    Inventor： Munehiro Kozuka ,  Tsutomu Negishi ,  Tatsuhito Kimura

    IPC: H01J37/09 ,  H01J37/305

    CPC classification number: H01J37/09 ,  H01J37/305

    Abstract: There is provided a sample milling apparatus capable of mitigating heat damage to a sample. The apparatus mills the sample by irradiating it with an ion beam and includes: an ion source for emitting the ion beam; and a shield plate placed on the sample and covering a part of the sample. The shield plate includes: a shield surface on which the ion beam impinges; and a bottom surface connected to the shield surface and forming a bottom edge. The bottom surface is smaller in area than the shield surface.

    Specimen Machining Device and Specimen Machining Method
    9.
    发明申请
    Specimen Machining Device and Specimen Machining Method 有权

    公开(公告)号：US20230015109A1

    公开(公告)日：2023-01-19

    申请号：US17865850

    申请日：2022-07-15

    Applicant: JEOL Ltd.

    Inventor： Tatsuhito Kimura ,  Munehiro Kozuka ,  Naoki Sugano

    IPC: G01B21/06 ,  G02B21/18 ,  G02B21/26

    Abstract: A specimen machining device includes an illumination system that illuminates a specimen; a camera that photographs the specimen; and a processing unit that controls the illumination system and the camera, and acquires a machining control image which is used for controlling an ion source and a display image which is displayed on a display unit. The processing unit controls the illumination system to illuminate the specimen under a machining illumination condition; acquires the machining control image by controlling the camera to photograph the specimen illuminated under the machining control illumination condition; controls the ion source based on the machining control image; controls the illumination system to illuminate the specimen under a display illumination condition which is different from the machining control illumination condition; acquires the display image by controlling the camera to photograph the specimen illuminated under the display illumination condition; and displays the display image on the display unit.

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