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    Charged Particle Beam Source and Charged Particle Beam System
    1.
    发明公开
    Charged Particle Beam Source and Charged Particle Beam System 审中-公开

    公开(公告)号：US20230317400A1

    公开(公告)日：2023-10-05

    申请号：US18121931

    申请日：2023-03-15

    Applicant: JEOL Ltd.

    Inventor： Kyouichi Kamino ,  Tomohisa Fukuda ,  Norikazu Arima ,  Yasuyuki Okano ,  Keiichi Yamamoto

    IPC: H01J37/067 ,  H01J37/18 ,  H01J37/28

    CPC classification number: H01J37/067 ,  H01J37/18 ,  H01J37/28

    Abstract: Provided is a charged particle beam source having an emitter that can be replaced easily. The charged particle beam source includes an electron gun chamber; a first unit including both a supportive insulative member mechanically supporting a cable and a first set of terminals electrically connected to the cable; and a second unit including both the emitter that releases charged particles and a second set of terminals electrically connected to the emitter. The chamber has a side wall provided with a through-hole in which the first unit is secured. The second unit can be detachably mounted to the first unit. Within the chamber, the emitter is placed on an optical axis, so that the first and second sets of terminals are brought into contact with each other.

    Image Processing Method and Transmission Electron Microscope
    3.
    发明申请
    Image Processing Method and Transmission Electron Microscope 审中-公开

    公开(公告)号：US20200371331A1

    公开(公告)日：2020-11-26

    申请号：US16879904

    申请日：2020-05-21

    Applicant: JEOL Ltd.

    Inventor： Yuta Ikeda ,  Tomohiro Haruta ,  Katsunori Ichikawa ,  Tomohisa Fukuda ,  Yuji Konyuba

    IPC: G02B21/00 ,  G02B21/36 ,  G06K9/00

    Abstract: An image processing method includes: acquiring an optical microscope image of a specimen; acquiring a transmission electron microscope image of the specimen having been thinned; and superimposing the optical microscope image on the transmission electron microscope image and causing a display section to display the superimposed images, and in superimposing the optical microscope image on the transmission electron microscope image and causing the display section to display the superimposed images, the optical microscope image is distorted to match a field of view of the optical microscope image with a field of view of the transmission electron microscope image.

    Specimen Processing Holder and Specimen Processing Method
    4.
    发明公开
    Specimen Processing Holder and Specimen Processing Method 审中-公开

    公开(公告)号：US20240021405A1

    公开(公告)日：2024-01-18

    申请号：US18222068

    申请日：2023-07-14

    Applicant: JEOL Ltd.

    Inventor： Yoshikazu Sasaki ,  Tomohisa Fukuda ,  Tomohiro Mihira ,  Norimasa Sakuta ,  Misumi Kadoi ,  Tatsuhito Kimura

    IPC: H01J37/20

    CPC classification number: H01J37/20

    Abstract: A holder includes a first sub holder configured to hold a primary specimen, and a second sub holder configured to hold a support member. The primary specimen is processed in a first state where the holder is disposed within a first specimen processing apparatus. Subsequently, in a second state where the holder is disposed within a second specimen processing apparatus, a secondary specimen is prepared from the primary specimen, the secondary specimen is moved onto the support member, and a thin film specimen is prepared from the secondary specimen.

    Sample Chip Worktable and Retainer
    8.
    发明申请
    Sample Chip Worktable and Retainer 有权

    公开(公告)号：US20210094166A1

    公开(公告)日：2021-04-01

    申请号：US17030598

    申请日：2020-09-24

    Applicant: JEOL Ltd.

    Inventor： Tomohisa Fukuda ,  Yuji Konyuba ,  Yuuta Ikeda ,  Tomohiro Haruta

    IPC: B25H1/10 ,  G02B21/34 ,  H01J37/20

    Abstract: A retainer is placed on a retainer holding portion formed on a sample chip worktable. With an operation of a button, a take-out support mechanism operates. That is, an upthrust pin moves upward. With this process, an orientation of a sample chip stored in the retainer is changed from a horizontal orientation to an inclined orientation. A plurality of openings through which the upthrust pin passes are formed in the retainer.

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