公开(公告)号：US20160067665A1

公开(公告)日：2016-03-10

申请号：US14785150

申请日：2014-04-16

Applicant: JIANGSU ZHONGNENG POLYSILICON TECHNOLOGY DEVELOPMENT CO., LTD.

Inventor： Wenwu JIANG ,  Hongfu JIANG ,  Feng WU ,  Zhenwu ZHONG ,  Wenlong CHEN

IPC: B01J8/24 ,  C01B33/03 ,  B01J8/18

CPC classification number: B01J8/24 ,  B01J8/1827 ,  B01J8/1836 ,  B01J8/42 ,  B01J19/02 ,  B01J2208/00433 ,  B01J2208/00469 ,  B01J2208/00893 ,  B01J2208/00902 ,  B01J2219/0209 ,  B01J2219/0218 ,  B01J2219/0227 ,  B01J2219/0263 ,  B01J2219/0286 ,  C01B33/03

Abstract: The present invention relates to a fluidized bed reactor, comprising a reaction tube, a distributor and a heating device, the reaction tube and the distributor at the bottom of the reaction tube composing a closed space, the distributor comprising a gas inlet and a product outlet, and the reaction tube comprising a tail gas outlet and a seed inlet at the top or upper part respectively, characterized in that the reaction tube comprises a reaction inner tube and a reaction outer tube, and the heating device is an induction heating device placed within a hollow cavity formed between the external wall of the reaction inner tube and the internal wall of the reaction outer tube, wherein the hollow cavity is filled with hydrogen, nitrogen or inert gas for protection, and is able to maintain a pressure of about 0.01 to about 5 MPa; and also to a process of producing high purity granular polysilicon using the reactor. The fluidized bed reactor according to the present invention uses induction heating to heat directly the silicon particles inside the reaction chamber, such that the temperature of the reaction tube is lower than that inside the reaction chamber, which accordingly avoids deposition on the tube wall and results in more uniform heating, and thus is useful for large diameter fluidized bed reactors with much increased output for a single reactor.

Abstract translation: 本发明涉及一种流化床反应器，包括反应管，分配器和加热装置，反应管和分配器在构成封闭空间的反应管的底部，分配器包括气体入口和产物出口 ，反应管分别在顶部或上部包括尾气出口和种子入口，其特征在于反应管包括反应内管和反应外管，加热装置是放置在反应管内的感应加热装置 形成在反应内管的外壁和反应外管的内壁之间的中空腔，其中空腔充满氢气，氮气或惰性气体以保护，并且能够将压力保持在约0.01至 约5MPa; 以及使用反应器生产高纯度颗粒状多晶硅的方法。 根据本发明的流化床反应器使用感应加热来直接加热反应室内的硅颗粒，使得反应管的温度低于反应室内的温度，从而避免了沉积在管壁上并产生结果 在更均匀的加热中，因此对于单个反应器具有大大增加的输出的大直径流化床反应器是有用的。