公开(公告)号：US20110260055A1

公开(公告)日：2011-10-27

申请号：US12764902

申请日：2010-04-21

申请人： JOE WANG ,  VAN-DUC NGUYEN ,  YI-XIANG WANG ,  JACK JAU ,  ZHONGWEI CHEN

发明人： JOE WANG ,  VAN-DUC NGUYEN ,  YI-XIANG WANG ,  JACK JAU ,  ZHONGWEI CHEN

IPC分类号： H01J37/21 ,  G01N23/22 ,  G01B11/24 ,  H01J37/28

CPC分类号： G01B11/22 ,  G01N23/04 ,  G01N23/20058 ,  G01N2223/32 ,  G01N2223/3301 ,  G01N2223/3302 ,  G01N2223/646 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2482 ,  H01J2237/2487

摘要： The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.

摘要翻译： 本发明一般涉及图像系统的动态聚焦调整。 本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法 应用于样品表面。 仅作为示例，本发明已经应用于扫描电子检查系统。 但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。