公开(公告)号：US20190157128A1

公开(公告)日：2019-05-23

申请号：US16183754

申请日：2018-11-08

Applicant: JSR CORPORATION

Inventor： Hiroyuki ISHII ,  Hitoshi KATOU ,  Hiroki ISHIKAWA ,  Noriko KITAHAMA ,  Hirofumi SASAKI ,  Hikaru MIZUNO

IPC: H01L21/683 ,  H01L21/48 ,  C09J171/12

Abstract: A workpiece treating method includes a step (1) of forming a stack including a support, a temporary fixing material and a workpiece wherein the material includes a layer containing a polymer (A) in a range of not less than 50 mass %, the polymer (A) including a structural unit represented by the formula (A1), and the workpiece is held on the material; a step (2) of processing the workpiece and/or transporting the stack; and a step (3) of applying a shear force to the material to thereby separate the workpiece from the support. R1 is a divalent organic group including at least one aromatic ring, each of two oxygen atoms bonded to R1 in (A1) is bonded to the aromatic ring, and, when R1 includes two or more aromatic rings, each of the two oxygen atoms is bonded to any one of the aromatic rings.

公开(公告)号：US20250164883A1

公开(公告)日：2025-05-22

申请号：US18951824

申请日：2024-11-19

Applicant: JSR CORPORATION

Inventor： Motohiro SHIRATANI ,  Fumiko YONEZAWA ,  Takehiro NAKAYAMA ,  Masahiro ARAKI ,  Hirofumi SASAKI

IPC: G03F7/039 ,  C08L25/18 ,  C08L33/06 ,  C08L33/16 ,  G03F7/00 ,  G03F7/004 ,  G03F7/20

Abstract: A radiation-sensitive composition includes: a first polymer comprising a structural unit (I) having an acid-dissociable group; a second polymer comprising a structural unit (i) represented by formula (f1); and a solvent. The acid-dissociable group has an iodo group. RK1 is a hydrogen atom, a fluorine atom, or the like; LY1 is a divalent hydrocarbon group having 1 to 10 carbon atoms; LY2 is —COO—* or —OCO—*, *is a bond on an Rf1 side; Rf1 is a monovalent hydrocarbon group having 1 to 10 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms; Rf2 and Rf3 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms; s is an integer of 0 to 3, and when Rf1 is the monovalent hydrocarbon group having 1 to 10 carbon atoms, s is an integer of 1 to 3.