公开(公告)号：US20250164883A1

公开(公告)日：2025-05-22

申请号：US18951824

申请日：2024-11-19

Applicant: JSR CORPORATION

Inventor： Motohiro SHIRATANI ,  Fumiko YONEZAWA ,  Takehiro NAKAYAMA ,  Masahiro ARAKI ,  Hirofumi SASAKI

IPC: G03F7/039 ,  C08L25/18 ,  C08L33/06 ,  C08L33/16 ,  G03F7/00 ,  G03F7/004 ,  G03F7/20

Abstract: A radiation-sensitive composition includes: a first polymer comprising a structural unit (I) having an acid-dissociable group; a second polymer comprising a structural unit (i) represented by formula (f1); and a solvent. The acid-dissociable group has an iodo group. RK1 is a hydrogen atom, a fluorine atom, or the like; LY1 is a divalent hydrocarbon group having 1 to 10 carbon atoms; LY2 is —COO—* or —OCO—*, *is a bond on an Rf1 side; Rf1 is a monovalent hydrocarbon group having 1 to 10 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms; Rf2 and Rf3 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms; s is an integer of 0 to 3, and when Rf1 is the monovalent hydrocarbon group having 1 to 10 carbon atoms, s is an integer of 1 to 3.