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1.
公开(公告)号:US10146131B2
公开(公告)日:2018-12-04
申请号:US14862352
申请日:2015-09-23
申请人: JSR CORPORATION
发明人: Shin-ya Nakafuji , Fumihiro Toyokawa , Gouji Wakamatsu , Yoshio Takimoto , Katsuhisa Mizoguchi , Takashi Okada , Takaaki Uno , Takeshi Endo , Masaki Moritsugu
IPC分类号: G03F7/11 , C07D493/10 , C08G65/40 , C07C255/54 , C08G65/38 , C09D171/00 , G03F7/16 , G03F7/36 , H01L21/02 , C09D171/10 , G03F7/09
摘要: A composition includes a compound including a partial structure represented by formula (1), and solvent. In the formula (1), X1 and X2 each independently represent a substituted or unsubstituted ring structure having 4 to 10 ring atoms constituted taken together with the spiro carbon atom and the carbon atoms of the aromatic ring adjacent to X1 or X2; n1 and n2 are each independently an integer of 0 to 2; and the sum of k1 and k2 are each independently an integer of 1 to 8, wherein the sum of k1 and k2 is no less than 2 and no greater than 16. The compound is preferably represented by formula (2). The sum of k1 and k2 in the formula (1) is preferably no less than 3.