公开(公告)号：US20240150680A1

公开(公告)日：2024-05-09

申请号：US18460625

申请日：2023-09-04

Applicant: JSR CORPORATION

Inventor： Hiroyuki Tano

IPC: C11D11/00 ,  C11D7/26 ,  C11D7/32 ,  C11D7/50 ,  G03F7/42 ,  H01L21/02

CPC classification number: C11D11/0047 ,  C11D7/261 ,  C11D7/263 ,  C11D7/264 ,  C11D7/3209 ,  C11D7/3218 ,  C11D7/3281 ,  C11D7/5022 ,  G03F7/42 ,  H01L21/02057

Abstract: A composition for semiconductor processing according to the disclosure contains (A) a compound represented by the following general formula (1), (B) a compound represented by the following general formula (2), (C) a compound having at least one functional group selected from the group consisting of an amino group and a salt thereof and a hydroxyl group (excluding the compound represented by the following general formula (1), a compound having a carboxyl group and a nitrogen-containing heterocyclic compound) and (D) a liquid medium, and, when the content of the (A) component is indicated by MA [mass %] and the content of the (B) component is indicated by MB [mass %], MA/MB is 1.0×102 to 1.0×104.


R2N(OH)  (1)



R2NH  (2)



(In the formula (1) and the formula (2), R's each independently represent an alkyl group having 1 to 4 carbon atoms.)

公开(公告)号：US20240150677A1

公开(公告)日：2024-05-09

申请号：US18457365

申请日：2023-08-29

Applicant: JSR Corporation

Inventor： Hiroyuki Tano

IPC: C11D3/37 ,  C11D3/20 ,  C11D3/28 ,  C11D11/00 ,  H01L21/02

CPC classification number: C11D3/3707 ,  C11D3/201 ,  C11D3/28 ,  C11D11/0047 ,  H01L21/0206 ,  H01L21/02074 ,  H01L21/30604

Abstract: A composition for semiconductor processing according to the disclosure contains (A) a compound represented by the following general formula (1), (B) a compound represented by the following general formula (2), (C) a compound having at least one functional group selected from the group consisting of an amino group and a salt thereof (excluding a compound having a carboxyl group and a nitrogen-containing heterocyclic compound) and (D) a liquid medium, and, when the content of the (A) component is indicated by MA [mass %] and the content of the (B) component is indicated by MB [mass %], MA/MB is 1.0×102 to 1.0×106.


RO(CH2)2O(CH2)2OH  (1)



ROH  (2)

(In the formula (1) and the formula (2), R's represent the same hydrocarbon group.)