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    Vertical cavity surface emitting laser having a gain guide aperture interior to an oxide confinement layer
    2.
    发明授权
    Vertical cavity surface emitting laser having a gain guide aperture interior to an oxide confinement layer 失效
    垂直空腔表面发射激光器，其具有内部到氧化物限制层的增益引导孔

    公开(公告)号：US07432118B2

    公开(公告)日：2008-10-07

    申请号：US11147135

    申请日：2005-06-06

    申请人： James A. Cox ,  Eva Strzelecka

    发明人： James A. Cox ,  Eva Strzelecka

    IPC分类号： H01L33/00

    CPC分类号： H01S5/18333 ,  H01S5/18308 ,  H01S5/18311 ,  H01S5/18358 ,  H01S5/2063

    摘要： A VCSEL with current confinement achieved by an oxide insulating region and by an ion implant region. An annular shaped oxide layer is formed, and a gain guide ion implant is formed. The ion implant gain guide includes a central region having high conductivity. The VCSEL further includes first and second mirrors that are separated by an optical path of at least one wavelength. Furthermore, the oxide insulating region beneficially has a optical path of less than ¼ wavelength. The ion implanted spatial region is beneficially concentrically aligned with the oxide insulating region.

    摘要翻译： 具有由氧化物绝缘区域和离子注入区域实现的具有电流限制的VCSEL。 形成环形氧化物层，形成增益导向离子注入。 离子注入增益引导件包括具有高导电性的中心区域。 VCSEL还包括由至少一个波长的光路分开的第一和第二反射镜。 此外，氧化物绝缘区有利地具有小于1/4波长的光路。 离子注入的空间区域有利地与氧化物绝缘区域同心对齐。

    Vertical cavity surface emitting laser having a gain guide aperture interior to an oxide confinement layer
    3.
    发明授权
    Vertical cavity surface emitting laser having a gain guide aperture interior to an oxide confinement layer 有权
    垂直空腔表面发射激光器，其具有内部到氧化物限制层的增益引导孔

    公开(公告)号：US06904072B2

    公开(公告)日：2005-06-07

    申请号：US10028437

    申请日：2001-12-28

    申请人： James A. Cox ,  Eva Strzelecka

    发明人： James A. Cox ,  Eva Strzelecka

    IPC分类号： H01S5/183 ,  H01S5/20 ,  H01S5/00

    CPC分类号： H01S5/18333 ,  H01S5/18308 ,  H01S5/18311 ,  H01S5/18358 ,  H01S5/2063

    摘要： A VCSEL with current confinement achieved by an oxide insulating region and by an ion implant region. An annular shaped oxide layer is formed, and a gain guide ion implant is formed. The ion implant gain guide includes a central region having high conductivity. The VCSEL further includes first and second mirrors that are separated by an optical path of at least one wavelength. Furthermore, the oxide insulating region beneficially has a optical path of less than ¼ wavelength. The ion implanted spatial region is beneficially concentrically aligned with the oxide insulating region.

    摘要翻译： 具有由氧化物绝缘区域和离子注入区域实现的具有电流限制的VCSEL。 形成环形氧化物层，形成增益导向离子注入。 离子注入增益引导件包括具有高导电性的中心区域。 VCSEL还包括由至少一个波长的光路分开的第一和第二反射镜。 此外，氧化物绝缘区有利地具有小于1/4波长的光路。 离子注入的空间区域有利地与氧化物绝缘区域同心对齐。