公开(公告)号：US06790779B2

公开(公告)日：2004-09-14

申请号：US10202331

申请日：2002-07-24

申请人： James H. Schermerhorn ,  Matthew C. Nielsen ,  Richard J. Saia ,  Jeffrey B. Fortin

发明人： James H. Schermerhorn ,  Matthew C. Nielsen ,  Richard J. Saia ,  Jeffrey B. Fortin

IPC分类号： H01L21302

CPC分类号： B81C1/00619 ,  B81B2203/033 ,  B81C1/00412 ,  B81C2201/0132 ,  B81C2201/016 ,  H01L21/0332 ,  H01L21/3065 ,  H01L21/3081 ,  Y10S438/964

摘要： A method for creating deep features in a Si-containing substrate for use in fabricating MEMS type devices is provided. The method includes first forming a thin Ni hardmask on a surface of a Si-containing substrate. The Ni hardmask is patterned using conventional photolithography and wet etching so as to expose at least one portion of the underlying Si-containing substrate. The at least one exposed portion of the Si-containing substrate, not containing the patterned hardmask, is then etched in a plasma that includes free radicals generated from a gaseous mixture of chlorine (Cl2), sulfur hexafluoride (SF6) and oxygen (O2). The interaction of the gas species in the plasma yields a rapid silicon etch rate that is highly selective to the Ni hardmask. The etch rate ratio of Si to Ni using the inventive method is greater than 250:1.

摘要翻译： 提供了一种用于制造用于制造MEMS型器件的含Si衬底中的深度特征的方法。 该方法包括首先在含Si衬底的表面上形成薄的Ni硬掩模。 使用常规的光刻和湿法刻蚀图案化Ni硬掩模，以暴露下面的含Si衬底的至少一部分。 然后，在包含由氯（Cl 2），六氟化硫（SF 6）和氧气（O 2）的气体混合物产生的自由基的等离子体中蚀刻含有图案化硬掩模的含Si衬底的至少一个暴露部分， 。 等离子体中的气体物质的相互作用产生了对Ni硬掩模高度选择性的快速硅蚀刻速率。 使用本发明方法的Si与Ni的蚀刻速率比大于250:1。

公开(公告)号：US06883774B2

公开(公告)日：2005-04-26

申请号：US10277028

申请日：2002-10-21

申请人： Matthew C. Nielsen ,  Laura J. Meyer ,  Todd G. Wetzel ,  Stanton E. Weaver ,  Jeffrey B. Fortin ,  Renato Guida

发明人： Matthew C. Nielsen ,  Laura J. Meyer ,  Todd G. Wetzel ,  Stanton E. Weaver ,  Jeffrey B. Fortin ,  Renato Guida

IPC分类号： F15C5/00 ,  F16K99/00 ,  F16K7/12

CPC分类号： F16K99/0001 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0015 ,  F16K99/0048 ,  F16K99/0057 ,  F16K2099/0074

摘要： A microvalve and a method of forming a microvalve. The microvalve comprises first and second layers, a diaphragm member and a switching means. The first and second layers are secured together to form a valve body that forms an inlet opening for receiving fluid, an outlet opening for conducting fluid from the valve body, and a flow channel for conducting fluid from the inlet to the outlet. The diaphragm is disposed between the layers, and is movable between open and closed positions. In these position, the diaphragm, respectively, allows and blocks the flow of fluid from the inlet to the flow channel. The diaphragm is biased to the closed position, and moves from the closed position to the open position when the pressure of fluid in the inlet reaches a preset value. The switching means is connected to the valve body for moving the diaphragm to the closed position against the pressure of fluid in the inlet. Preferably, the microvalve is constructed out of SiC and stainless steel materials, allowing the microvalve to be used in a harsh environment.

摘要翻译： 一种微型阀和形成微型阀的方法。 微型阀包括第一和第二层，隔膜构件和开关装置。 第一层和第二层被固定在一起以形成阀体，其形成用于接收流体的入口开口，用于从阀体传导流体的出口，以及用于将流体从入口传导到出口的流动通道。 隔膜设置在层之间，并且可在打开位置和关闭位置之间移动。 在这些位置上，隔膜分别允许和阻止流体从入口到流动通道的流动。 隔膜被偏压到关闭位置，并且当入口中的流体的压力达到预设值时，隔膜从关闭位置移动到打开位置。 切换装置连接到阀体，用于抵抗入口中的流体的压力将隔膜移动到关闭位置。 优选地，微型阀由SiC和不锈钢材料制成，允许微型阀在恶劣的环境中使用。