公开(公告)号：US20200030913A1

公开(公告)日：2020-01-30

申请号：US16515115

申请日：2019-07-18

Applicant: Japan Display Inc.

Inventor： Mototsugu NARIYA

IPC: B23K26/21 ,  C23C14/04

Abstract: A manufacturing device for mask unit having a mask frame and a mask fixed to the mask frame includes a stage including a frame holding stage, and an alignment stage arranged with a plurality of lift-pins, a holding part for holding a reference plate arranged facing the stage, a mask holding unit, the mask holding unit being arranged between the stage and the reference plate, and a camera for imaging a direction of the stage passing through the reference plate, wherein the mask holding unit holds the mask at a surface on the frame side, the mask holding unit rises and falls above the alignment stage by the plurality of the lift-pins, the plurality of lift-pins includes a plurality of first lift-pins capable of contacting the mask holding unit, and the camera images a first reference marker on the mask and a second reference marker on the reference plate.

公开(公告)号：US20190352765A1

公开(公告)日：2019-11-21

申请号：US16527717

申请日：2019-07-31

Applicant: Japan Display Inc.

Inventor： Keisuke ONO ,  Atsushi TAKEDA ,  Tetsuyuki YAMADA ,  Mototsugu NARIYA ,  Mitsugu TAMEKAWA ,  Takeshi OOKAWARA ,  Naoto HIRASAKA ,  Taiki WATANABE

IPC: C23C14/04 ,  C25D1/10 ,  C23C14/34

Abstract: A deposition mask according to an embodiment of the present invention includes: a mask main body including a pattern portion formed with a pattern opening, and a frame portion surrounding the pattern portion; a mask frame supporting the frame portion of the mask main body; and an intermediate member having a shape corresponding to the mask frame, the intermediate member being disposed between the mask main body and the mask frame. The mask main body and a first face of the intermediate member are joined together, and the mask frame and a face of the intermediate member on the side opposite to the first face are joined together.