公开(公告)号：US20190352765A1

公开(公告)日：2019-11-21

申请号：US16527717

申请日：2019-07-31

Applicant: Japan Display Inc.

Inventor： Keisuke ONO ,  Atsushi TAKEDA ,  Tetsuyuki YAMADA ,  Mototsugu NARIYA ,  Mitsugu TAMEKAWA ,  Takeshi OOKAWARA ,  Naoto HIRASAKA ,  Taiki WATANABE

IPC: C23C14/04 ,  C25D1/10 ,  C23C14/34

Abstract: A deposition mask according to an embodiment of the present invention includes: a mask main body including a pattern portion formed with a pattern opening, and a frame portion surrounding the pattern portion; a mask frame supporting the frame portion of the mask main body; and an intermediate member having a shape corresponding to the mask frame, the intermediate member being disposed between the mask main body and the mask frame. The mask main body and a first face of the intermediate member are joined together, and the mask frame and a face of the intermediate member on the side opposite to the first face are joined together.

公开(公告)号：US20170104185A1

公开(公告)日：2017-04-13

申请号：US15283834

申请日：2016-10-03

Applicant: Japan Display Inc.

Inventor： Taiki WATANABE

IPC: H01L51/56 ,  C23C16/04 ,  H01L51/00 ,  H01L51/52 ,  H01L27/32

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C16/042 ,  H01L27/3244 ,  H01L51/0011 ,  H01L51/5012 ,  H01L51/5253 ,  H01L2227/323

Abstract: A film-forming mask includes a mask body having a first surface facing a film forming surface, a second surface opposite to the first surface, and an opening exposing a part of the film forming surface. The mask body is thinned from the side of the first surface along an edge of the opening.

公开(公告)号：US20170247788A1

公开(公告)日：2017-08-31

申请号：US15425224

申请日：2017-02-06

Applicant: Japan Display Inc.

Inventor： Taiki WATANABE

IPC: C23C14/04 ,  H01L51/00 ,  C23C14/34 ,  H01L51/56

CPC classification number: C23C14/042 ,  C23C14/34 ,  C23C14/56 ,  G02F1/1303 ,  G02F1/13439 ,  H01L51/0011 ,  H01L51/56

Abstract: A shadow mask includes a mask foil and a plurality of openings provided on the mask foil in accordance with a shape of at least one region where films are formed on a film forming object. The mask foil has an annular shape where first end of the mask foil and a second end of the mask foil, which is opposed to the first end of the mask foil, are connected to each other.