公开(公告)号：US08363380B2

公开(公告)日：2013-01-29

申请号：US12473882

申请日：2009-05-28

申请人： Je-Hsiung Lan ,  Evgeni P. Gousev ,  Wenyue Zhang ,  Manish Kothari ,  Sang-June Park

发明人： Je-Hsiung Lan ,  Evgeni P. Gousev ,  Wenyue Zhang ,  Manish Kothari ,  Sang-June Park

IPC分类号： H01G7/00 ,  H01G7/06

CPC分类号： H01G7/00 ,  H01G5/16 ,  H01P1/127 ,  Y10T29/435

摘要： MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.

摘要翻译： 描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。 在示例性设计中，MEMS变容二极管包括（i）电耦合到接收输入信号的第一端子的第一底板，（ii）电耦合到接收DC电压的第二端子的第二底板，以及（iii） 顶板形成在第一和第二底板上并电耦合到第三端子。 直流电压使顶板机械地移动并改变由输入信号观察到的电容。 在另一示例性设计中，MEMS变容二极管包括彼此形成并分别电耦合到第一，第二和第三端子的第一，第二和第三板。 第一和第二直流电压可以分别施加到第一和第三端子。 输入信号可以在第一和第二端子之间通过。

公开(公告)号：US20110109383A1

公开(公告)日：2011-05-12

申请号：US12473882

申请日：2009-05-28

申请人： Je-Hsiung Lan ,  Evgeni P. Gousev ,  Wenyue Zhang ,  Manish Kothari ,  Sang-June Park

发明人： Je-Hsiung Lan ,  Evgeni P. Gousev ,  Wenyue Zhang ,  Manish Kothari ,  Sang-June Park

IPC分类号： H01L29/93

CPC分类号： H01G7/00 ,  H01G5/16 ,  H01P1/127 ,  Y10T29/435

摘要： MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.

摘要翻译： 描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。 在示例性设计中，MEMS变容二极管包括（i）电耦合到接收输入信号的第一端子的第一底板，（ii）电耦合到接收DC电压的第二端子的第二底板，以及（iii） 顶板形成在第一和第二底板上并电耦合到第三端子。 直流电压使顶板机械地移动并改变由输入信号观察到的电容。 在另一示例性设计中，MEMS变容二极管包括彼此形成并分别电耦合到第一，第二和第三端子的第一，第二和第三板。 第一和第二直流电压可以分别施加到第一和第三端子。 输入信号可以在第一和第二端子之间通过。

公开(公告)号：US20130057558A1

公开(公告)日：2013-03-07

申请号：US13227263

申请日：2011-09-07

申请人： Chuan Pu ,  Yi Tao ,  Chandra S. Tupelly ,  Kostadin D. Djordjev ,  Fan Zhong ,  Rihui He ,  Wenyue Zhang

发明人： Chuan Pu ,  Yi Tao ,  Chandra S. Tupelly ,  Kostadin D. Djordjev ,  Fan Zhong ,  Rihui He ,  Wenyue Zhang

IPC分类号： G06T1/00 ,  G06F3/038 ,  B05D5/12 ,  H02N1/00

CPC分类号： G02B26/001 ,  B81B3/0072 ,  B81B2201/042 ,  B81B2203/019 ,  B81C2201/0167 ,  B81C2201/017

摘要： This disclosure provides systems, methods and apparatus for controlling a mechanical layer. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer positioned over the substrate to define a gap. The mechanical layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The mechanical layer is configured to have a curvature in a direction away from the substrate when the mechanical layer is in the relaxed position. In some implementations, the mechanical layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the mechanical layer upward when the sacrificial layer is removed.

摘要翻译： 本公开提供了用于控制机械层的系统，方法和装置。 在一个方面，机电系统装置包括基板和位于基板上方以限定间隙的机械层。 机械层可以在致动位置和松弛位置之间的间隙中移动，并且包括镜层，盖层和设置在镜层和盖层之间的电介质层。 当机械层处于松弛位置时，机械层被配置为具有远离基板的方向的曲率。 在一些实施方案中，机械层可以形成为具有朝向衬底的正应力梯度，当去除牺牲层时，可以向上引导机械层的曲率。

公开(公告)号：US20120056855A1

公开(公告)日：2012-03-08

申请号：US13011571

申请日：2011-01-21

申请人： Wenyue Zhang ,  Alok Govil ,  Ming-Hau Tung ,  Yi Tao

发明人： Wenyue Zhang ,  Alok Govil ,  Ming-Hau Tung ,  Yi Tao

IPC分类号： G09G5/00 ,  B05D5/12 ,  G02B26/00

CPC分类号： G02B26/001 ,  G09G3/3466 ,  G09G2300/0439

摘要： This disclosure provides systems, methods, and apparatus including one or more capacitance control layers to decrease the magnitude of an electric field between a movable layer and an electrode. In one aspect, a display device includes an electrode, a movable layer, and a capacitance control layer. At least a portion of the movable layer can be configured to move toward the electrode when a voltage is applied across the electrode and the movable layer and an interferometric cavity can be disposed between the movable layer and the first electrode. The capacitance control layer can be configured to decrease the magnitude of an electric field between the movable layer and the electrode when the voltage is applied across the movable layer and the electrode.

摘要翻译： 本公开提供了包括一个或多个电容控制层的系统，方法和装置，以减小可移动层和电极之间的电场的大小。 一方面，显示装置包括电极，可移动层和电容控制层。 可移动层的至少一部分可以被配置为当跨越电极和可移动​​层施加电压并且可以在可移动层和第一电极之间设置干涉腔时朝向电极移动。 电容控制层可以被配置为当跨越可移动层和电极施加电压时，减小可移动层和电极之间的电场的大小。