LASER MACHINING AND SCRIBING SYSTEMS AND METHODS
    3.
    发明申请
    LASER MACHINING AND SCRIBING SYSTEMS AND METHODS 审中-公开
    激光加工和切割系统和方法

    公开(公告)号:US20110132885A1

    公开(公告)日:2011-06-09

    申请号:US12962050

    申请日:2010-12-07

    IPC分类号: B23K26/00

    摘要: A laser machining system may include an opposite side camera to provide workpiece alignment from an opposite side of the system (i.e., the side opposite the laser machining process). The opposite side camera may be used with an air bearing positioning stage, and a portion of the stage and/or the opposite side camera may be moved to allow the opposite side camera to image a feature on the workpiece to be aligned. The opposite side alignment may be used with back side scribing and/or dual side scribing of a workpiece with alignment from one or both sides of the workpiece. Laser machining systems and methods may also be used to provide quasi-stealth scribing and multi-beam scribing.

    摘要翻译: 激光加工系统可以包括相对侧相机,以从系统的相对侧(即与激光加工过程相反的一侧)提供工件对准。 相对侧相机可以与空气轴承定位台一起使用,并且台架和/或相对侧相机的一部分可以被移动以允许相对侧相机对待对准的工件上的特征进行成像。 相对侧对准可以与来自工件的一侧或两侧对准的工件的背面划线和/或双面划线一起使用。 激光加工系统和方法也可用于提供准隐形划线和多光束划线。