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公开(公告)号:US20090008133A1
公开(公告)日:2009-01-08
申请号:US11568028
申请日:2004-12-27
申请人: Jeffrey W. Bullard , Dennis M. Brunner , Paul M. Harvey , Hideo Yamazaki , Hiroki Satoh , Hisayuki Nagai
发明人: Jeffrey W. Bullard , Dennis M. Brunner , Paul M. Harvey , Hideo Yamazaki , Hiroki Satoh , Hisayuki Nagai
CPC分类号: H05K3/243 , H05K3/108 , H05K3/184 , H05K3/4007 , H05K2201/0367 , H05K2203/0574 , Y10T29/49224
摘要: Provided are patterned circuits with accurately aligned raised features. Also provided are methods for making the circuits using photoresist-on-photoresist patterning.
摘要翻译: 提供具有精确对准的凸起特征的图案化电路。 还提供了使用光致抗蚀剂在光致抗蚀剂图案化上制造电路的方法。