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公开(公告)号：US06297579B1
公开(公告)日：2001-10-02
申请号：US09712482
申请日：2000-11-13
IPC分类号： H01L4104
CPC分类号： H01L41/0926 , H01L41/042 , H01L41/193 , Y10S310/80
摘要： Disclosed is a method and system for actively controlling the shape of a sheet of electroactive material; the system comprising: one or more electrodes attached to the frontside of the electroactive sheet; a charged particle generator, disposed so as to direct a beam of charged particles (e.g. electrons) onto the electrode; a conductive substrate attached to the backside of the sheet; and a power supply electrically connected to the conductive substrate; whereby the sheet changes its shape in response to an electric field created across the sheet by an accumulation of electric charge within the electrode(s), relative to a potential applied to the conductive substrate. Use of multiple electrodes distributed across on the frontside ensures a uniform distribution of the charge with a single point of e-beam incidence, thereby greatly simplifying the beam scanning algorithm and raster control electronics, and reducing the problems associated with “blooming”. By placing a distribution of electrodes over the front surface of a piezoelectric film (or other electroactive material), this arrangement enables improved control over the distribution of surface electric charges (e.g. electrons) by creating uniform (and possibly different) charge distributions within each individual electrode. Removal or deposition of net electric charge can be affected by controlling the secondary electron yield through manipulation of the backside electric potential with the power supply. The system can be used for actively controlling the shape of space-based deployable optics, such as adaptive mirrors and inflatable antennae.
摘要翻译： 公开了一种用于主动地控制电活性材料片的形状的方法和系统; 所述系统包括：连接到所述电活性片的前侧的一个或多个电极; 带电粒子发生器，被设置成将带电粒子束（例如电子）引导到电极上; 连接到片材背面的导电基底; 以及电连接到所述导电基板的电源; 由此片材相对于施加到导电基底上的电位，通过电极内的电荷积累而响应于跨片材产生的电场来改变其形状。 使用分布在前端的多个电极确保电荷与单个电子束入射的均匀分布，从而大大简化了光束扫描算法和光栅控制电子设备，并减少了与“开花”相关的问题。 通过将电极分布放置在压电薄膜（或其他电活性材料）的前表面上，通过在每个个体内产生均匀的（可能不同的）电荷分布，可以改善对表面电荷（例如电子）的分布的控制。 电极。 通过用电源操纵背面电位来控制二次电子产量可以影响净电荷的去除或沉积。 该系统可用于主动控制基于空间的可部署光学器件的形状，例如自适应反射镜和充气天线。
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2.发明授权Method and apparatus for suppressing regenerative instability and related chatter in machine tools 有权用于抑制机床中再生不稳定性和相关颤振的方法和装置公开(公告)号：US06189426B1
公开(公告)日：2001-02-20
申请号：US09296041
申请日：1999-04-21
IPC分类号： B23B2500
CPC分类号： B23B31/117 , B23B31/00 , B23B2228/16 , B23B2250/16 , B23B2265/08 , B23C3/00 , B23C2250/16 , B23Q11/0039 , Y10T82/10 , Y10T82/25 , Y10T82/2595 , Y10T408/76 , Y10T409/304312
摘要： Methods of and apparatuses for mitigating chatter vibrations in machine tools or components thereof. Chatter therein is suppressed by periodically or continuously varying the stiffness of the cutting tool (or some component of the cutting tool), and hence the resonant frequency of the cutting tool (or some component thereof). The varying of resonant frequency of the cutting tool can be accomplished by modulating the stiffness of the cutting tool, the cutting tool holder, or any other component of the support for the cutting tool. By periodically altering the impedance of the cutting tool assembly, chatter is mitigated. In one embodiment, a cyclic electric (or magnetic) field is applied to the spindle quill which contains an electro-rheological (or magneto-rheological) fluid. The variable yield stress in the fluid affects the coupling of the spindle to the machine tool structure, changing the natural frequency of oscillation. Altering the modal characteristics in this fashion disrupts the modulation of current tool vibrations with previous tool vibrations recorded on the workpiece surface.
摘要翻译： 用于减轻机床或其部件中的颤振的方法和装置。 通过周期性地或连续地改变切削工具（或切削工具的某些部件）的刚度以及因此切削工具（或其一些部件）的共振频率来抑制其中的颤动。 切削工具的共振频率的变化可以通过调节切削工具，切割工具保持器或用于切割工具的支撑件的任何其它部件的刚度来实现。 通过周期性地改变切割工具组件的阻抗，减轻颤动。 在一个实施例中，将循环电（或磁场）施加到包含电流变（或磁流变）流体的主轴套管。 流体中的可变屈服应力影响主轴与机床结构的耦合，改变了固有的振荡频率。 以这种方式改变模态特性会破坏当前工件振动的调制，并记录在工件表面上。
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公开(公告)号：US5913955A
公开(公告)日：1999-06-22
申请号：US22729
申请日：1998-02-12
CPC分类号： F16F15/02 , B23B29/022 , Y10S82/904 , Y10S82/905 , Y10T408/23 , Y10T408/76 , Y10T409/304312 , Y10T82/10 , Y10T82/2595
摘要： The present invention provides vibration damping method and apparatus that can damp vibration in more than one direction without requiring disassembly, that can accommodate varying tool dimensions without requiring re-tuning, and that does not interfere with tool tip operations and cooling. The present invention provides active dampening by generating bending moments internal to a structure such as a boring bar to dampen vibration thereof.
摘要翻译： 本发明提供了可以在不需要拆卸的情况下阻尼多个方向上的振动的振动阻尼方法和装置，其可以适应不同的工具尺寸而不需要重新调谐，并且不干扰刀尖操作和冷却。 本发明通过产生诸如镗杆的结构内部的弯曲力矩来抑制其振动来提供主动阻尼。
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公开(公告)号：US06446486B1
公开(公告)日：2002-09-10
申请号：US09299804
申请日：1999-04-26
IPC分类号： G01N356
CPC分类号： B81B3/0021 , B81B2201/0292 , B81B2203/051 , G01N3/56 , G01N19/02 , G01N2203/0282 , G01N2203/0286 , G01N2203/0676 , G01N2203/0682
摘要： A microelectromechanical (MEM) friction test apparatus is disclosed for determining static or dynamic friction in MEM devices. The friction test apparatus, formed by surface micromachining, is based on a friction pad supported at one end of a cantilevered beam, with the friction pad overlying a contact pad formed on the substrate. A first electrostatic actuator can be used to bring a lower surface of the friction pad into contact with an upper surface of the contact pad with a controlled and adjustable force of contact. A second electrostatic actuator can then be used to bend the cantilevered beam, thereby shortening its length and generating a relative motion between the two contacting surfaces. The displacement of the cantilevered beam can be measured optically and used to determine the static or dynamic friction, including frictional losses and the coefficient of friction between the surfaces. The test apparatus can also be used to assess the reliability of rubbing surfaces in MEM devices by producing and measuring wear of those surfaces. Finally, the friction test apparatus, which is small in size, can be used as an in situ process quality tool for improving the fabrication of MEM devices.
摘要翻译： 公开了一种用于确定MEM装置中静态或动态摩擦的微机电（MEM）摩擦试验装置。 通过表面微加工形成的摩擦试验装置基于支撑在悬臂梁的一端的摩擦垫，摩擦垫覆盖在基底上形成的接触垫。 可以使用第一静电致动器来使摩擦垫的下表面与接触垫的上表面接触，并具有受控且可调节的接触力。 然后可以使用第二静电致动器来弯曲悬臂梁，从而缩短其长度并在两个接触表面之间产生相对运动。 可以光学地测量悬臂梁的位移，并用于确定静摩擦或动摩擦，包括摩擦损失和表面之间的摩擦系数。 测试装置也可用于通过产生和测量这些表面的磨损来评估MEM装置中摩擦表面的可靠性。 最后，尺寸小的摩擦试验装置可以用作改进MEM装置制造的原位工艺质量工具。
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5.发明授权Method and apparatus for suppressing regenerative instability and related chatter in machine tools 失效用于抑制机床中再生不稳定性和相关颤振的方法和装置
公开(公告)号：US5957016A
公开(公告)日：1999-09-28
申请号：US835977
申请日：1997-04-11
IPC分类号： B23B31/00 , B23B31/117 , B23C3/00 , B23Q11/00 , B23B3/00
CPC分类号： B23B31/117 , B23B31/00 , B23C3/00 , B23Q11/0039 , B23B2228/16 , B23B2250/16 , B23B2265/08 , B23C2250/16 , Y10T408/76 , Y10T409/304312 , Y10T82/10 , Y10T82/25 , Y10T82/2595
摘要： Methods of and apparatuses for mitigating chatter vibrations in machine tools or components thereof. Chatter therein is suppressed by periodically or continuously varying the stiffness of the cutting tool (or some component of the cutting tool), and hence the resonant frequency of the cutting tool (or some component thereof). The varying of resonant frequency of the cutting tool can be accomplished by modulating the stiffness of the cutting tool, the cutting tool holder, or any other component of the support for the cutting tool. By periodically altering the impedance of the cutting tool assembly, chatter is mitigated. In one embodiment, a cyclic electric (or magnetic) field is applied to the spindle quill which contains an electro-rheological (or magneto-rheological) fluid. The variable yield stress in the fluid affects the coupling of the spindle to the machine tool structure, changing the natural frequency of oscillation. Altering the modal characteristics in this fashion disrupts the modulation of current tool vibrations with previous tool vibrations recorded on the workpiece surface.
摘要翻译： 用于减轻机床或其部件中的颤振的方法和装置。 通过周期性地或连续地改变切削工具（或切削工具的某些部件）的刚度以及因此切削工具（或其一些部件）的共振频率来抑制其中的颤动。 切削工具的共振频率的变化可以通过调节切削工具，切割工具保持器或用于切割工具的支撑件的任何其它部件的刚度来实现。 通过周期性地改变切割工具组件的阻抗，减轻颤动。 在一个实施例中，将循环电（或磁场）施加到包含电流变（或磁流变）流体的主轴套管。 流体中的可变屈服应力影响主轴与机床结构的耦合，改变了固有的振荡频率。 以这种方式改变模态特性会破坏当前工件振动的调制，并记录在工件表面上。
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