Method for cleaning substrate surface
    1.
    发明申请
    Method for cleaning substrate surface 有权
    清洗基材表面的方法

    公开(公告)号:US20050014375A1

    公开(公告)日:2005-01-20

    申请号:US10850261

    申请日:2004-05-20

    摘要: There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2 gas is used as a first processing gas. By absorbing potential in a grounded grid or baffle between a plasma generator and a substrate, only radicals are passed to the substrate, and HF gas is used as a second processing gas. Thus a native oxide layer, a chemical oxide layer, or a damaged portion formed on the silicon substrate during etching is removed in annealing step with H2 flow. The environment of a chamber is maintained constant by introducing a conditioning gas after each wafer process. Therefore, process repeatability is improved.

    摘要翻译: 提供了使用等离子体从硅衬底表面除去天然氧化物层,化学氧化物层和损坏部分以及来自金属表面的污染物的表面清洁装置和方法。 使用H2和N2气体的混合物作为第一处理气体。 通过吸收等离子体发生器和衬底之间的接地栅极或挡板中的电势,只有自由基被传递到衬底,而HF气体被用作第二处理气体。 因此,在退火步骤中,通过H 2流除去蚀刻期间形成在硅衬底上的自然氧化物层,化学氧化物层或损坏部分。 通过在每个晶片处理之后引入调节气体,使室的环境保持恒定。 因此,改善了工艺重复性。

    Method for cleaning substrate surface
    2.
    发明申请

    公开(公告)号:US20060157079A1

    公开(公告)日:2006-07-20

    申请号:US11385391

    申请日:2006-03-21

    IPC分类号: B08B6/00

    摘要: There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2 gas is used as a first processing gas. By absorbing potential in a grounded grid or baffle between a plasma generator and a substrate, only radicals are passed to the substrate, and HF gas is used as a second processing gas. Thus a native oxide layer, a chemical oxide layer, or a damaged portion formed on the silicon substrate during etching is removed in annealing step with H2 flow. The environment of a chamber is maintained constant by introducing a conditioning gas after each wafer process. Therefore, process repeatability is improved.

    Method for cleaning substrate surface
    3.
    发明授权
    Method for cleaning substrate surface 有权
    清洗基材表面的方法

    公开(公告)号:US07111629B2

    公开(公告)日:2006-09-26

    申请号:US10850261

    申请日:2004-05-20

    IPC分类号: B08B6/00

    摘要: There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2 gas is used as a first processing gas. By absorbing potential in a grounded grid or baffle between a plasma generator and a substrate, only radicals are passed to the substrate, and HF gas is used as a second processing gas. Thus a native oxide layer, a chemical oxide layer, or a damaged portion formed on the silicon substrate during etching is removed in annealing step with H2 flow. The environment of a chamber is maintained constant by introducing a conditioning gas after each wafer process. Therefore, process repeatability is improved.

    摘要翻译: 提供了一种使用等离子体从硅衬底表面除去自然氧化物层,化学氧化物层和损坏部分以及来自金属表面的污染物的表面清洁装置和方法。 使用H 2 N 2和N 2 O 2气体的混合物作为第一处理气体。 通过吸收等离子体发生器和衬底之间的接地栅极或挡板中的电势,只有自由基被传递到衬底,而HF气体被用作第二处理气体。 因此,在H 2 H 2流的退火步骤中除去蚀刻期间在硅衬底上形成的天然氧化物层,化学氧化物层或损坏部分。 通过在每个晶片处理之后引入调节气体,使室的环境保持恒定。 因此,改善了工艺重复性。

    APPARATUS AND METHOD FOR CONTROLLING STAND-ALONE MODE OF MOBILE TERMINAL
    4.
    发明申请
    APPARATUS AND METHOD FOR CONTROLLING STAND-ALONE MODE OF MOBILE TERMINAL 审中-公开
    用于控制移动终端的独立模式的装置和方法

    公开(公告)号:US20070076647A1

    公开(公告)日:2007-04-05

    申请号:US11469795

    申请日:2006-09-01

    申请人: Jeong-Ho Kim

    发明人: Jeong-Ho Kim

    IPC分类号: H04B7/185

    CPC分类号: H04M1/72563 H04W52/0254

    摘要: An apparatus and method for controlling a stand-alone mode of a mobile terminal is provided. When the mobile terminal is turned on, the controller switches the mobile terminal to the stand-alone mode using a stored control signal. A stand-alone mode of a mobile terminal can be continuously maintained even when a battery of the mobile terminal replaced by a user after the mobile terminal is switched to the stand-alone mode.

    摘要翻译: 提供了一种用于控制移动终端的独立模式的装置和方法。 当移动终端打开时,控制器使用存储的控制信号将移动终端切换到独立模式。 即使移动终端的电池在移动终端切换到独立模式之后,移动终端的电池被用户替换,也可以连续地维持移动终端的独立模式。

    Paper binding system of image forming apparatus and method for controlling the same
    5.
    发明授权
    Paper binding system of image forming apparatus and method for controlling the same 有权
    图像形成装置的纸张装订系统及其控制方法

    公开(公告)号:US07147217B2

    公开(公告)日:2006-12-12

    申请号:US10483377

    申请日:2002-07-18

    IPC分类号: B41L43/12

    摘要: A paper binding system of an image forming apparatus, such as a printer and a copier, and a method for controlling the same are disclosed, in which finishing processes such as stapling and folding are performed by exactly gripping papers ejected from the image forming apparatus without any scattering. The paper binding system of the image forming apparatus includes a paper moving means 150 moving papers ejected from the image forming apparatus, a paper positioning unit 88 temporarily receiving the papers moved from the paper moving means and positioning them, a stapler unit 84 stapling the papers received in the paper positioning unit, a folding means 151 folding the stapled papers, and an eject tray 135 receiving the papers finished through the stapler unit and/or the folding means.

    摘要翻译: 公开了一种诸如打印机和复印机的图像形成装置的装订系统及其控制方法,其中通过精确地夹持从图像形成装置喷射的纸而执行诸如装订和折叠的精加工过程,而没有 任何散射。 图像形成装置的纸张装订系统包括:纸移动装置150,移动从图像形成装置排出的纸张;纸定位单元88,临时接收从纸张移动装置移动的纸张并定位它们;订书机单元84, 被收纳在纸张定位单元中,折叠装置151折叠装订的纸张;以及弹出托盘135,其接收通过订书机单元和/或折叠装置完成的纸张。

    Fencing training sword
    6.
    发明申请
    Fencing training sword 失效
    击剑训练剑

    公开(公告)号:US20060141432A1

    公开(公告)日:2006-06-29

    申请号:US10562484

    申请日:2004-07-05

    IPC分类号: A63B69/02

    摘要: The present invention relates to a sword for a trainee in the art of swordsmanship; and more particularly, to a multistructured sword of a double or triple structure having a shock-absorbing space in a sword body. Accordingly, the trainee can effectively practices stabbing and cutting actions in the traditional swordsmanship by reducing a shock imposed on him. The present invention includes: a grip formed at an end of the training sword; a sword body member, wherein the sword body member includes at least one sword body inner cover for reducing a shock generated by a striking action and a sword body outer cover, which covers the sword body inner cover, wherein a gap is provided between the sword body inner cover and the sword body outer cover; a cross-guard formed at a boundary between the sword body member and the grip; and a scabbard for protecting the sword body member, wherein a length of the scabbard is shorter than that of the sword body member so that the sword body member passes through the scabbard.

    摘要翻译: 本发明涉及剑术领域的受训者的剑; 更具体地说,涉及一种具有在剑体内具有减震空间的双结构或三重结构的多结构剑。 因此,受训人员可以通过减少对他的冲击来有效地践行传统剑术中的刺杀行动。 本发明包括:形成在训练剑的末端的把手; 剑身构件,其中所述剑体构件包括至少一个剑身内盖,用于减少由打击动作产生的冲击和剑体外盖,其覆盖剑体内盖,其中在剑之间设置间隙 身体内盖和剑体外盖; 形成在剑本体构件和把手之间的边界处的十字防护件; 以及用于保护剑身构件的剑鞘,其中剑鞘的长度比剑身构件的长度短,使得剑身构件穿过剑鞘。

    Mobile terminal, system and method for controlling access to an enhanced services system
    7.
    发明授权
    Mobile terminal, system and method for controlling access to an enhanced services system 有权
    用于控制对增强型服务系统的访问的移动终端,系统和方法

    公开(公告)号:US07813721B2

    公开(公告)日:2010-10-12

    申请号:US11533028

    申请日:2006-09-19

    申请人: Jeong-Ho Kim

    发明人: Jeong-Ho Kim

    IPC分类号: H04Q3/70

    CPC分类号: H04W48/08 H04W12/08

    摘要: A mobile terminal having restricted access to an enhanced services system includes a transceiver which transmits and receives wireless signals, a memory which stores a first preferred roaming list (PRL) listing a basic communication system and an enhanced services system, and a second PRL listing the basic communication system but not the enhanced services system, and a controller which restricts access of the mobile terminal to the enhanced services system by deactivating the first PRL and activating the second PRL in response to receipt of an authentication failure report from the enhanced services system. A system for restricting access to an enhanced services system includes an enhanced services system which provides enhanced services to authorized users and prevents unauthorized users from communicating with the enhanced services system.

    摘要翻译: 具有对增强业务系统的限制访问的移动终端包括发送和接收无线信号的收发机,存储列出基本通信系统和增强业务系统的第一优选漫游列表(PRL)的存储器,以及列出第 基本通信系统而不是增强服务系统,以及控制器,其通过取消激活第一PRL并且响应于从增强服务系统接收到认证失败报告而激活第二PRL来限制移动终端对增强服务系统的访问。 用于限制对增强型服务系统的访问的系统包括增强服务系统,其向授权用户提供增强的服务,并防止未经授权的用户与增强型服务系统通信。

    Method to form a contact hole
    8.
    发明申请
    Method to form a contact hole 有权
    形成接触孔的方法

    公开(公告)号:US20050181588A1

    公开(公告)日:2005-08-18

    申请号:US10778293

    申请日:2004-02-13

    申请人: Jeong-Ho Kim

    发明人: Jeong-Ho Kim

    摘要: A example method of forming of a contact hole by removing residue and oxide spacer beside a nitride spacer after a CF containing etch. We provide a gate structure with nitride spacers on the sidewalls of the gate. We provide a dielectric layer (oxide) over the substrate and gate structure. We form a contact photoresist pattern over the oxide dielectric layer. We etch the oxide dielectric layer using fluorocarbons (CxFy) to form contact openings and residual spacer. The photoresist is striped. Preferably, a NF3 and N2 and H2 plasma treatment is performed to deposit a byproducts layer over the residual spacer. The byproducts layer and residual spacer are removed preferably using one of the following processes: (1) heat (2) DI rinse or (3) IR or UV radiation.

    摘要翻译: 在含有CF的蚀刻之后,通过在氮化物间隔物旁边除去残留物和氧化物间隔物来形成接触孔的示例性方法。 我们在栅极的侧壁上提供具有氮化物间隔物的栅极结构。 我们在衬底和栅极结构之上提供介电层(氧化物)。 我们在氧化物介电层上形成接触光刻胶图形。 我们用碳氟化合物(CxFy)对氧化物介质层进行刻蚀,以形成接触开口和残余间隔物。 光刻胶条纹。 优选地,执行NF 3 N 3和N 2 H 2 H 2 H 2 H 2 H 2等离子体处理以在剩余间隔物上沉积副产物层。 副产物层和剩余间隔物优选使用以下方法之一除去:(1)加热(2)DI冲洗或(3)IR或UV辐射。

    Portable devices for providing acoustic source information, apparatuses for providing acoustic source information, and methods of providing acoustic source information
    9.
    发明授权
    Portable devices for providing acoustic source information, apparatuses for providing acoustic source information, and methods of providing acoustic source information 有权
    用于提供声源信息的便携式设备,用于提供声源信息的设备以及提供声源信息的方法

    公开(公告)号:US08588946B2

    公开(公告)日:2013-11-19

    申请号:US11902414

    申请日:2007-09-21

    申请人: Jeong-Ho Kim

    发明人: Jeong-Ho Kim

    IPC分类号: H04L9/32

    摘要: Disclosed are portable devices having function for providing information and contents related to various kinds of acoustic sources, apparatuses for providing acoustic source information, and methods for providing acoustic source information. The portable device includes characteristic code extractor and controller. The characteristic code extractor receives acoustic source to divide the acoustic source into audio signal with audio frequency band and signal with supersonic frequency band, and extracts characteristic code of the audio signal with the audio frequency band from the signal with the supersonic frequency band. The controller transmits the characteristic code to acoustic information server, and outputs the acoustic source information corresponding to the characteristic code that is provided from the acoustic information server. Therefore, the acoustic source information can be provided without separate procedure for storing or processing various kinds of acoustic sources as well as music, and the process for providing acoustic source information is simpler.

    摘要翻译: 公开了具有用于提供与各种声源相关的信息和内容的功能的便携式设备,用于提供声源信息的设备以及用于提供声源信息的方法。 便携式设备包括特征码提取器和控制器。 特征码提取器接收声源,将声源分为具有音频频带的音频信号和具有超音速频带的信号,并从具有超音速频带的信号中提取具有音频频带的音频信号的特征码。 控制器将特征码发送到声信息服务器,并且输出与从声学信息服务器提供的特征码相对应的声源信息。 因此,可以提供声源信息,而不需要用于存储或处理各种声源以及音乐的单独过程,并且用于提供声源信息的处理更简单。

    Fencing training sword
    10.
    发明授权
    Fencing training sword 失效
    击剑训练剑

    公开(公告)号:US07278898B2

    公开(公告)日:2007-10-09

    申请号:US10562484

    申请日:2004-07-05

    IPC分类号: A63H33/30 A63H33/00

    摘要: The present invention relates to a sword for a trainee in the art of swordsmanship; and more particularly, to a multistructured sword of a double or triple structure having a shock-absorbing space in a sword body. Accordingly, the trainee can effectively practices stabbing and cutting actions in the traditional swordsmanship by reducing a shock imposed on him. The present invention includes: a grip formed at an end of the training sword; a sword body member, wherein the sword body member includes at least one sword body inner cover for reducing a shock generated by a striking action and a sword body outer cover, which covers the sword body inner cover, wherein a gap is provided between the sword body inner cover and the sword body outer cover; a cross-guard formed at a boundary between the sword body member and the grip; and a scabbard for protecting the sword body member, wherein a length of the scabbard is shorter than that of the sword body member so that the sword body member passes through the scabbard.

    摘要翻译: 本发明涉及剑术领域的受训者的剑; 更具体地说,涉及一种具有在剑体内具有减震空间的双结构或三重结构的多结构剑。 因此,受训人员可以通过减少对他的冲击来有效地践行传统剑术中的刺杀行动。 本发明包括:形成在训练剑的末端的把手; 剑身构件,其中所述剑体构件包括至少一个剑身内盖,用于减少由打击动作产生的冲击和剑体外盖,其覆盖剑体内盖,其中在剑之间设置间隙 身体内盖和剑体外盖; 形成在剑本体构件和把手之间的边界处的十字防护件; 以及用于保护剑身构件的剑鞘,其中剑鞘的长度比剑身构件的长度短,使得剑身构件穿过剑鞘。