摘要:
There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2 gas is used as a first processing gas. By absorbing potential in a grounded grid or baffle between a plasma generator and a substrate, only radicals are passed to the substrate, and HF gas is used as a second processing gas. Thus a native oxide layer, a chemical oxide layer, or a damaged portion formed on the silicon substrate during etching is removed in annealing step with H2 flow. The environment of a chamber is maintained constant by introducing a conditioning gas after each wafer process. Therefore, process repeatability is improved.
摘要:
There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2 gas is used as a first processing gas. By absorbing potential in a grounded grid or baffle between a plasma generator and a substrate, only radicals are passed to the substrate, and HF gas is used as a second processing gas. Thus a native oxide layer, a chemical oxide layer, or a damaged portion formed on the silicon substrate during etching is removed in annealing step with H2 flow. The environment of a chamber is maintained constant by introducing a conditioning gas after each wafer process. Therefore, process repeatability is improved.
摘要:
There is provided a surface cleaning apparatus and method using plasma to remove a native oxide layer, a chemical oxide layer, and a damaged portion from a silicon substrate surface, and contaminants from a metal surface. A mixture of H2 and N2 gas is used as a first processing gas. By absorbing potential in a grounded grid or baffle between a plasma generator and a substrate, only radicals are passed to the substrate, and HF gas is used as a second processing gas. Thus a native oxide layer, a chemical oxide layer, or a damaged portion formed on the silicon substrate during etching is removed in annealing step with H2 flow. The environment of a chamber is maintained constant by introducing a conditioning gas after each wafer process. Therefore, process repeatability is improved.
摘要翻译:提供了一种使用等离子体从硅衬底表面除去自然氧化物层,化学氧化物层和损坏部分以及来自金属表面的污染物的表面清洁装置和方法。 使用H 2 N 2和N 2 O 2气体的混合物作为第一处理气体。 通过吸收等离子体发生器和衬底之间的接地栅极或挡板中的电势,只有自由基被传递到衬底,而HF气体被用作第二处理气体。 因此,在H 2 H 2流的退火步骤中除去蚀刻期间在硅衬底上形成的天然氧化物层,化学氧化物层或损坏部分。 通过在每个晶片处理之后引入调节气体,使室的环境保持恒定。 因此,改善了工艺重复性。
摘要:
An apparatus and method for controlling a stand-alone mode of a mobile terminal is provided. When the mobile terminal is turned on, the controller switches the mobile terminal to the stand-alone mode using a stored control signal. A stand-alone mode of a mobile terminal can be continuously maintained even when a battery of the mobile terminal replaced by a user after the mobile terminal is switched to the stand-alone mode.
摘要:
A paper binding system of an image forming apparatus, such as a printer and a copier, and a method for controlling the same are disclosed, in which finishing processes such as stapling and folding are performed by exactly gripping papers ejected from the image forming apparatus without any scattering. The paper binding system of the image forming apparatus includes a paper moving means 150 moving papers ejected from the image forming apparatus, a paper positioning unit 88 temporarily receiving the papers moved from the paper moving means and positioning them, a stapler unit 84 stapling the papers received in the paper positioning unit, a folding means 151 folding the stapled papers, and an eject tray 135 receiving the papers finished through the stapler unit and/or the folding means.
摘要:
The present invention relates to a sword for a trainee in the art of swordsmanship; and more particularly, to a multistructured sword of a double or triple structure having a shock-absorbing space in a sword body. Accordingly, the trainee can effectively practices stabbing and cutting actions in the traditional swordsmanship by reducing a shock imposed on him. The present invention includes: a grip formed at an end of the training sword; a sword body member, wherein the sword body member includes at least one sword body inner cover for reducing a shock generated by a striking action and a sword body outer cover, which covers the sword body inner cover, wherein a gap is provided between the sword body inner cover and the sword body outer cover; a cross-guard formed at a boundary between the sword body member and the grip; and a scabbard for protecting the sword body member, wherein a length of the scabbard is shorter than that of the sword body member so that the sword body member passes through the scabbard.
摘要:
A mobile terminal having restricted access to an enhanced services system includes a transceiver which transmits and receives wireless signals, a memory which stores a first preferred roaming list (PRL) listing a basic communication system and an enhanced services system, and a second PRL listing the basic communication system but not the enhanced services system, and a controller which restricts access of the mobile terminal to the enhanced services system by deactivating the first PRL and activating the second PRL in response to receipt of an authentication failure report from the enhanced services system. A system for restricting access to an enhanced services system includes an enhanced services system which provides enhanced services to authorized users and prevents unauthorized users from communicating with the enhanced services system.
摘要:
A example method of forming of a contact hole by removing residue and oxide spacer beside a nitride spacer after a CF containing etch. We provide a gate structure with nitride spacers on the sidewalls of the gate. We provide a dielectric layer (oxide) over the substrate and gate structure. We form a contact photoresist pattern over the oxide dielectric layer. We etch the oxide dielectric layer using fluorocarbons (CxFy) to form contact openings and residual spacer. The photoresist is striped. Preferably, a NF3 and N2 and H2 plasma treatment is performed to deposit a byproducts layer over the residual spacer. The byproducts layer and residual spacer are removed preferably using one of the following processes: (1) heat (2) DI rinse or (3) IR or UV radiation.
摘要翻译:在含有CF的蚀刻之后,通过在氮化物间隔物旁边除去残留物和氧化物间隔物来形成接触孔的示例性方法。 我们在栅极的侧壁上提供具有氮化物间隔物的栅极结构。 我们在衬底和栅极结构之上提供介电层(氧化物)。 我们在氧化物介电层上形成接触光刻胶图形。 我们用碳氟化合物(CxFy)对氧化物介质层进行刻蚀,以形成接触开口和残余间隔物。 光刻胶条纹。 优选地,执行NF 3 N 3和N 2 H 2 H 2 H 2 H 2 H 2等离子体处理以在剩余间隔物上沉积副产物层。 副产物层和剩余间隔物优选使用以下方法之一除去:(1)加热(2)DI冲洗或(3)IR或UV辐射。
摘要:
Disclosed are portable devices having function for providing information and contents related to various kinds of acoustic sources, apparatuses for providing acoustic source information, and methods for providing acoustic source information. The portable device includes characteristic code extractor and controller. The characteristic code extractor receives acoustic source to divide the acoustic source into audio signal with audio frequency band and signal with supersonic frequency band, and extracts characteristic code of the audio signal with the audio frequency band from the signal with the supersonic frequency band. The controller transmits the characteristic code to acoustic information server, and outputs the acoustic source information corresponding to the characteristic code that is provided from the acoustic information server. Therefore, the acoustic source information can be provided without separate procedure for storing or processing various kinds of acoustic sources as well as music, and the process for providing acoustic source information is simpler.
摘要:
The present invention relates to a sword for a trainee in the art of swordsmanship; and more particularly, to a multistructured sword of a double or triple structure having a shock-absorbing space in a sword body. Accordingly, the trainee can effectively practices stabbing and cutting actions in the traditional swordsmanship by reducing a shock imposed on him. The present invention includes: a grip formed at an end of the training sword; a sword body member, wherein the sword body member includes at least one sword body inner cover for reducing a shock generated by a striking action and a sword body outer cover, which covers the sword body inner cover, wherein a gap is provided between the sword body inner cover and the sword body outer cover; a cross-guard formed at a boundary between the sword body member and the grip; and a scabbard for protecting the sword body member, wherein a length of the scabbard is shorter than that of the sword body member so that the sword body member passes through the scabbard.